Dimensional Micro and Nano Metrology

Hansen, Hans Nørgaard; Carneiro, K.; Haitjema, Han; Chiffre, Leonardo De

doi:10.1016/j.cirp.2006.10.005

Cited by 291 publications

(157 citation statements)

References 99 publications

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“…The ability to perform geometric assessment at the feature level can also serve as a tool to understand manufacturing process behaviour and performance, optimise process parameters, and compare manufacturing process variants. When manufacturing micro scale features there is often a lack of geometrical specification and tolerances [13]. Additionally, there may be a poor understanding of how the surface geometry affects the functional performance.…”

Section: Introductionmentioning

confidence: 99%

Study of manufacturing and measurement reproducibility on a laser textured structured surface

et al. 2016

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The version presented here may differ from the published version or from the version of record. If you wish to cite this item you are advised to consult the publisher's version. Please see the repository url above for details on accessing the published version and note that access may require a subscription. AbstractIn recent years there has been increasing interest in the use of structured surfaces to provide specific functional performance. Such surfaces often consist of localised micro scale surface features with predetermined geometries. The performance of the feature manufacturing process affects the functional performance of the surface, and can be assessed by measurement of the resulting surface features. Measurement of the resulting micro manufactured surface features necessitates use of areal optical surface topography instruments. However, conventional characterisation methods, based on areal surface texture parameters, often prove inadequate, and may fail to capture the relevant geometric properties needed for an effective dimensional verification. This paper investigates an alternative route to verification, based on the determination of geometric attributes of the micro fabricated features. This approach allows for direct assessment of manufacturing process performance, by comparison of the geometric attributes with their nominal values. An example application is shown in which a micromachining process (laser texturing) is used to fabricate a periodic pattern of dimples, which provide a low friction bearing surface. In this paper, manufacturing process performance is assessed by characterisation of the diameter and out of roundness. Sources of uncertainty associated with these geometric parameters are also considered.

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Section: Introductionmentioning

confidence: 99%

Study of manufacturing and measurement reproducibility on a laser textured structured surface

et al. 2016

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“…1. These parts, either manufactured by cutting processes or the new technology of LIGA manufacturing show high aspect ratios with poorly accessible corners (Hansen et al, 2006).…”

Section: Introductionmentioning

confidence: 99%

“…Micro-cutting tools, such as micro-drills, show tapered cutting edges with radii of single micro-metres combined with drill diameters down to 200 µm. As the shape of the cutting edge is essential for the cutting process and as for micro-tools a homogeneous sharp edge is very difficult to manufacture, the position and shape of the edge has to be measured (Bissacco et al, 2008;Hansen et al, 2006). Other measurement tasks cover micro-components like the micro-gears depicted in Fig.…”

Section: Introductionmentioning

confidence: 99%

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Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

Schuler

Hausotte

Sun

2015

J. Sens. Sens. Syst.

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Abstract. Measurement tasks of modern micro-and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.

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“…Full 3D measurements of these micro-and nanoparts with uncertainties down to 100 nm or even below are increasingly in demand [1,2]. For instance, spray holes of fuel injection nozzles are to be fabricated with diameters of less than 100 µm for a better fuel atomization.…”

Section: Introductionmentioning

confidence: 99%

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

et al. 2016

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Improved metrological capabilities for three-dimensional (3D) measurements of various complex micro-and nanoparts are increasingly in demand. This paper gives an overview of the research activities carried out by the Physikalisch-Technische Bundesanstalt (PTB), the national metrology institute of Germany, to meet this demand. Examples of recent research advances in the development of instrumentation and calibration standards are presented. An ultra-precision nanopositioning and nanomeasuring machine (NMM) has been upgraded with regard to its mirror corner, interferometers and angle sensors, as well as its weight compensation, its electronic controller, its vibration damping stage and its instrument chamber. Its positioning noise has been greatly reduced, e.g., from 1σ = 0.52 nm to 1σ = 0.13 nm for the z-axis. The well-known tactile-optical fibre probe has been further improved with regard to its 3D measurement capability, isotropic probing stiffness and dual-sphere probing styli. A 3D atomic force microscope (AFM) and assembled cantilever probes (ACPs) have been developed which allow full 3D measurements of smaller features with sizes from a few micrometres down to tens of nanometres. In addition, several measurement standards for force, geometry, contour and microgear measurements have been introduced. A type of geometry calibration artefact, referred to as the "3D Aztec artefact", has been developed which applies wet-etched micro-pyramidal marks for defining reference coordinates in 3D space. Compared to conventional calibration artefacts, it has advantages such as a good surface quality, a well-defined geometry and cost-effective manufacturing. A task-specific micro-contour calibration standard has been further developed for ensuring the traceability of, e.g., high-precision optical measurements at microgeometries. A workpiece-like microgear standard embodying different gear geometries (modules ranging from 0.1 mm to 1 mm) has also been developed at the Physikalisch-Technische Bundesanstalt.

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Dimensional Micro and Nano Metrology

Cited by 291 publications

References 99 publications

Study of manufacturing and measurement reproducibility on a laser textured structured surface

Study of manufacturing and measurement reproducibility on a laser textured structured surface

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

Overview of 3D Micro- and Nanocoordinate Metrology at PTB

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