DIMES-01, a baseline BIFET process for smart sensor experimentation

Nanver, L.K.; Goudena, E.J.G.; Zeijl, H.W. van

doi:10.1016/0924-4247(93)85008-4

Cited by 40 publications

(4 citation statements)

References 18 publications

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“…This combines the advantages of a thick membrane in the surface of bulk micromachining, with the easy photolithography and onechip pressure reference of surface micromachining. A bipolar electronic process (DIMES-01 [8]) was chosen, as it is robust and relatively insensitive to ionizing radiation, compared to CMOS processes, so no shielding is necessary. The same epitaxially grown membrane is also used to provide some thermal insulation between the thermal flow sensor and the substrate.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

Design considerations for silicon sensors for use in catheters and guide wires

Goosen

2002

Smart Mater. Struct.

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A growing field of application for micro-electromechanical systems is the medical field of minimally invasive interventions. These procedures use catheters and guide wires, inserted into the blood vessels, to reach places deep inside the body, without the need for open surgery. This reduces recovery time and discomfort to the patient, operating time and the risks involved with general anaesthetics. For proper diagnosis and monitoring treatment, more information is needed; silicon sensors for catheters and guide wires have been developed to obtain this information. As the accurate positioning of these instruments is problematic, it is desirable to combine several sensors on the same instrument to measure several parameters at the same location. However, there are many considerations in designing silicon sensors for this application, such as small size, low power consumption, biocompatibility of materials, patient safety, a limited number of connections, packaging, survivability of the sensor during use, etc. This paper will discuss the design considerations of micromachined (silicon) sensors and actuators for use in catheters and guide wires. As an example, a multiparameter blood sensor, measuring flow velocity, pressure and oxygen saturation, will be discussed.

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Section: Fabrication Techniquesmentioning

confidence: 99%

Design considerations for silicon sensors for use in catheters and guide wires

Goosen

2002

Smart Mater. Struct.

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“…This combines the advantages of a thick membrane in the surface of bulk micromachining, with the easy photolithography and one chip pressure reference of surface micromachining. A bipolar electronic process (DIMES-01 [8]) was chosen, as it is robust and relatively insensitive to ionising radiation, compared to CMOS processes, so no shielding is necessary. The same epitaxially grown membrane is also used to provide some thermal insulation between the thermal flow sensor and the substrate.…”

Section: Fabrication Techniquesmentioning

confidence: 99%

<title>Silicon sensors for catheters and guide wires</title>

Goosen

2001

BioMEMS and Smart Nanostructures

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One area that can make use of the miniature size of present day micro electromechanical systems (MEMS) is that of the medical field of minimally invasive interventions. These procedures, used for both diagnosis and treatment, use catheters that are advanced through the blood vessels deep into the body, without the need for surgery. This reduces the recovery time and discomfort to the patient, avoids the risk of general anaesthetics, and in many cases reduces the cost of the treatment.However, once inside the body, the doctor performing the procedure is completely reliant on the information the catheter(s) can provide in addition to the projection imaging of a fluoroscope. A good range of sensors for catheters is required for a proper diagnosis. To this end, miniature sensors are being developed to be fitted to catheters and guide wires. As the accurate positioning of these instruments is problematic, it is necessary to combine several sensors on the same guide wire or catheter to measure several parameters in the same location. This however, brings many special problems to the design of the sensors, such as small size, low power consumption, bio-compatibility of materials, robust design for patient safety, a limited number of connections, packaging, etc. This paper will go into both the advantages and design problems of micromachined sensors and actuators in catheters and guide wires. As an example, a multi parameter blood sensor, measuring flow velocity, pressure and oxygen saturation, will be discussed.

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“…Once it has been established that the micromachined structures are to be integrated with the electronics it is necessary to establish the process limitations and whether additions to the standard process are to be permitted. The devices can be integrated with CMOS [11,12] or bipolar electronics [13]. It is important to establish a strategy in terms of how and when in the process the additional steps required for the micromachining can be inserted into the standard process.…”

Section: Introductionmentioning

confidence: 99%

Development of surface micromachining techniques compatible with on-chip electronics

French

1996

J. Micromech. Microeng.

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Silicon has long been known to have excellent mechanical properties although the full potential of the material was not realized until micromachining techniques enabled the fabrication of true mechanical structures. The first types of structure were fabricated using bulk micromachining techniques, where the silicon wafer is etched to leave free-standing mechanical structures. More recently surface micromachining techniques have received considerable attention. In this case the mechanical structures are fabricated in thin films deposited on the silicon wafer surface. This development has yielded structures considerably smaller than those fabricated in bulk micromachining. In this paper the development of surface micromachining techniques is reviewed. This includes the modifications required to achieve compatibility with standard electronic circuitry.

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DIMES-01, a baseline BIFET process for smart sensor experimentation

Cited by 40 publications

References 18 publications

Design considerations for silicon sensors for use in catheters and guide wires

Design considerations for silicon sensors for use in catheters and guide wires

<title>Silicon sensors for catheters and guide wires</title>

Development of surface micromachining techniques compatible with on-chip electronics

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