Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures

Ottermann, Rico; Klaas, Daniel; Dencker, Folke; Wurz, Marc Christopher; Hoheisel, Dominik; Peter, Rottengatter; Kruspe, Thomas

doi:10.1109/sensors47125.2020.9278661

Cited by 11 publications

(10 citation statements)

References 7 publications

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“…With a measurement voltage of 10 V, a mean value of 5.0⋅10 12 ± 1.0⋅10 12 Ω results which leads to a resistivity of 1.2⋅10 14 ± 2.4⋅10 13 Ωcm. This value indicates a good agreement with the literature [29,39].…”

Section: Insulation Layer Resistancesupporting

confidence: 92%

“…For this whole manufacturing process, the Institute of Micro Production Technology of the Leibniz University Hannover developed a patented coating system [26][27][28]. Manufactured strain gauge sensors were able to withstand maximum operation temperatures up to 400 °C and showed higher temperature compensation capability compared to common sensors [1,29]. Thin-film-based sensors have been integrated into metal tools to measure process parameters in industrial processes such as sheet temperature during mold hardening or material flow of the metal sheet during deep drawing [30,31].…”

Section: Strain and Temperature Measurements Using Directly Deposited...mentioning

confidence: 99%

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Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges

et al. 2022

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Background Commonly, polymer foil-based strain gauges are used for the incremental hole drilling method to obtain residual stress depth profiles. These polymer foil-based strain gauges are prone to errors due to application by glue. For example zero depth setting is thus often erroneous due to necessary removal of polymer foil and glue. This is resulting in wrong use of the calibration coefficients and depth resolution and thus leading to wrong calculations of the obtained residual stress depth profiles. Additionally common polymer foil-based sensors are limited in their application regarding e.g. exposure to high temperatures. Objective This paper aims at a first step into the qualification of directly deposited thin film strain gauges for use with the incremental hole drilling method. With the directly deposited sensors, uncertainties regarding the determination of calibration coefficients and zero depth setting due to the absence of glue can be reduced to a minimum. Additionally, new areas of interest such as the investigation of thermally sprayed metallic layers can be addressed by the sensors due to their higher temperature resilience and their component inherent minimal thickness. Methods For the first time, different layouts of directly deposited thin film strain gauges for residual stress measurements were manufactured on a stainless steel specimen. Strain measurements during incremental hole drilling using a bespoke hole drilling device were conducted. Residual stress depth profiles were calculated using the Integral method of the ASTM E837 standard. Afterwards, strain measurements with conventional polymer foil-based strain gauges during incremental hole drilling were conducted and residual stress depth profiles were calculated accordingly. Finally the obtained profiles were compared regarding characteristic values. Results The residual stress depth profiles obtained from directly deposited strain gauges generally match the ones obtained from conventional polymer foil based strain gauges. With the novel strain gauges, zero depth setting is simplified due to the absence of glue and polymer foil. With the direct deposition, a wide variety of rosette designs is possible, enabling a more detailed evaluation of the strain field around the drilled hole. Conclusions The comparative analysis of the obtained residual stress depth profiles shows the general feasibility of directly deposited strain gauges for residual stress measurements. Detailed investigations on uncertainty sources are still necessary.

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Section: Insulation Layer Resistancesupporting

confidence: 92%

Section: Strain and Temperature Measurements Using Directly Deposited...mentioning

confidence: 99%

Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges

et al. 2022

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“…The detailed influence of different roughness values on the thin-film resistivity has to be investigated in the future. A thin-film resistivity value for constantan from the literature is 1.10•10 −4 Ωcm [11], which is in the region of the measured value but still shows a deviation of 18%. Slightly different alloy compositions could be the reason here.…”

Section: Initial Resistancementioning

confidence: 64%

“…One approach to obtain the maximum measurement information directly at the contact point of the bearing washer and rollers is to use strain gauges in thin-film technology, which are produced directly on the bearing washer where the EHD contact is located. They can generate data at previously inaccessible measurement positions [10] due to their small thickness of less than 5 µm [11]. They withstand temperatures up to at least 400 • C [12]-which surpasses the range of conventional polymer film-based sensors [13]-, have high adhesion on steel [12] and can be applied and structured on curved surfaces as well [14].…”

Section: Introductionmentioning

confidence: 99%

Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components

et al. 2022

Self Cite

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In the context of intelligent components in industrial applications in the automotive, energy or construction sector, sensor monitoring is crucial for security issues and to avoid long and costly downtimes. This article discusses component-inherent thin-film sensors for this purpose, which, in contrast to conventional sensor technology, can be applied inseparably onto the component’s surface via sputtering, so that a maximum of information about the component’s condition can be generated, especially regarding deformation. This article examines whether the sensors can continue to generate reliable measurement data even after critical component loads have been applied. This extends their field of use concerning plastic deformation behavior. Therefore, any change in sensor properties is necessary for ongoing elastic strain measurements. These novel fundamentals are established for thin-film constantan strain gauges and platinum temperature sensors on steel substrates. In general, a k-factor decrease and an increase in the temperature coefficient of resistance with increasing plastic deformation could be observed until a sensor failure above 0.5 % plastic deformation (constantan) occurred (1.3 % for platinum). Knowing these values makes it possible to continue measuring elastic strains after critical load conditions on a machine component in terms of plastic deformation. Additionally, a method of sensor-data fusion for the clear determination of plastic deformation and temperature change is presented.

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“…Metals, semiconductors, and ceramics can be used as sensitive materials for thin-film strain gauges. However, so far, only a few high-temperature thin-film strain gauge materials have been reported, such as Ni80Cr20 [ 7 , 8 ], PdCr [ 9 ], TAN-Cu [ 10 ], and TiAlN [ 11 ], but the oxidation resistance is poor and the electrical performance decreases at high temperatures. Ni80Cr20 and TiAlN are used at temperatures below 600 °C.…”

Section: Introductionmentioning

confidence: 99%

Development of High-Temperature Wire-Grid Thin Film Strain Gauges

Cui

Zhang³

et al. 2022

Sensors

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Aero-engine turbine stator blades are often used in harsh environments with high temperatures and high pressure and are prone to fatigue fractures. Real-time and accurate monitoring of blade surface stress and strain is critical to ensure safe operation. In this study, thin-film strain gauges (TFSGs) that can be used in high-temperature environments above 1000 °C were designed and fabricated using a PtRh6 thin film as the sensitive material. The hysteresis effect of the stress transfer upon establishing a thermo-mechanical coupling finite element model of the Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSGs was analyzed and the optimal combination of thin-film thickness and longitudinal grid length of wire-grid TFSGs was determined. In order to solve the problem of high-temperature insulation, the insulating properties of a single-layer Al2O3 insulating film, a single-layer ZrO2 insulating film, a double-layer Al2O3/ZrO2 composite insulating film, and a four-layer Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film at high temperature were compared and studied using scanning electron microscopy to analyze the microscopic morphology and composition of the four insulating film structures. The results showed that the four-layer Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film had the best insulating properties at high temperatures. On this basis, an Al2O3/ZrO2/Al2O3/ZrO2 composite insulating film, PtRh6 sensitive layer, and Al2O3 protective film were sequentially deposited on a high-temperature nickel-based alloy equal-strength beam using DC pulsed magnetron sputtering technology to obtain an Inconel718 high-temperature nickel-based alloy equal-strength beam PtRh6 TFSG. Its gauge factor (GF) and temperature coefficient of resistance (TCR) were calibrated, and the results showed that the sensor could be used in harsh environments of 1000 °C. The above results provide new ideas for measuring stress and strain in aerospace under high-temperature and high-pressure environments.

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Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures

Cited by 11 publications

References 7 publications

Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges

Residual Stresses from Incremental Hole Drilling Using Directly Deposited Thin Film Strain Gauges

Degeneration Effects of Thin-Film Sensors after Critical Load Conditions of Machine Components

Development of High-Temperature Wire-Grid Thin Film Strain Gauges

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