Direct e-beam lithography of PDMS

Bowen, James; Cheneler, David; Robinson, Alex P. G.

doi:10.1016/j.mee.2012.02.049

Cited by 25 publications

(21 citation statements)

References 13 publications

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“…Similarly, a previous study by Bowen et al explored the effect of e-beam exposure on the mechanical properties of uncross linked PDMS with an aim to validating PDMS as a potential e-beam resist. [31] Interestingly, this study reported very similar mechanical responses of the pre-polymer to e-beam exposure to those reported herein. Conversely, we employed direct-write focused e-beam patterning, which has not previously been explored, to produce geometrical patterns of increased rigidity on viscoelastic PDMS substrates.…”

Section: Discussionsupporting

confidence: 82%

The Functional Response of Mesenchymal Stem Cells to Electron‐Beam Patterned Elastomeric Surfaces Presenting Micrometer to Nanoscale Heterogeneous Rigidity

et al. 2017

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Biggs, M. J. P. et al. (2017) The functional response of mesenchymal stem cells to electron-beam patterned elastomeric surfaces presenting micrometer to nanoscale heterogeneous rigidity. Advanced Materials, 29(39), 1702119.There may be differences between this version and the published version. You are advised to consult the publisher's version if you wish to cite from it.Biggs, M. J.P. et al. (2017) AbstractCells directly probe and respond to the physicomechanical properties of their extracellular environment, a dynamic process which has been shown to play a key role in regulating both cellular adhesive processes and differential cellular function. Recent studies indicate that stem cells show lineage-specific differentiation when cultured on substrates approximating the stiffness profiles of specific tissues. Although tissues are associated with ranging Young's modulus values for bulk rigidity, at the sub-cellular level, and particularly at the micro-and nanoscales, tissues are comprised of heterogeneous distributions of rigidity.Lithographic processes have been widely explored in cell biology for the generation of analytical substrates to probe cellular physicomechanical responses. In this work, we show for the first time that that direct-write e-beam exposure can significantly alter the rigidity of elastomeric PDMS substrates and develop a new class of two-dimensional elastomeric substrates with controlled patterned rigidity ranging from the micron to the nanoscale. The mechano-response of human mesenchymal stem cells to e-beam patterned substrates was subsequently probed in vitro and significant modulation of focal adhesion formation and osteochondral lineage commitment was observed as a function of both feature diameter and rigidity, establishing the groundwork for a new generation of biomimetic material interfaces.3

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Section: Discussionsupporting

confidence: 82%

The Functional Response of Mesenchymal Stem Cells to Electron‐Beam Patterned Elastomeric Surfaces Presenting Micrometer to Nanoscale Heterogeneous Rigidity

et al. 2017

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“…In particular, with an increasing of radiation dose (long‐lasting or higher power O 2 plasma treatment) the hardness of the PDMS film will increase steadily, which is attributed to the increase of cross‐link density and the decrease of molecular mobility. A similar phenomenon has been reported in previous works . A higher degree of cross‐linking results in a tighter network, which is responsible for the steady increase in hardness and results in the loss of tensility of the PDMS film.…”

Section: Resultssupporting

confidence: 87%

Mechanically Tunable Bilayer Composite Grating for Unique Light Manipulation and Information Storage

Meng

Zhang

et al. 2018

Advanced Optical Materials

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Composite gratings play important roles in modern information technology. However, such gratings are generally based on the same structural pattern with limited types, and their structural parameters are difficult to tune, which greatly limit their application. A mechanically tunable composite grating in bilayer film, which orthogonally couples a sinusoidal phase grating and a rectangular phase grating, is developed here. The structural parameters of the grating can be well tuned by mechanically stretching or releasing the grating in the uniaxial direction. Naturally, this property allows tunable light manipulation: that is, a single incident laser beam can be split into a 2D diffraction beams array, and the intensity and propagation angle of each diffraction beam can be precisely controlled via mechanical manipulation of the grating. A theoretical model based on scalar diffraction theory that can quantitatively describe and accurately predict this light manipulation is further established. In addition, after treatment with an electron beam, the tunable structures can be immobilized, which enables the storage of information in the bilayer film. This work may open up new pathways for composite grating fabrication and further extend the applications of composite gratings in diverse fields.

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“…There is a significant increase in the elastic modulus at the irradiated area, because of the forming SiO x species, as it was shown before [31]. Thus, as the formation of the SiO x progresses, the created micropillars are more stable.…”

Section: Resultssupporting

confidence: 55%

“…As a result, very smooth, high aspect ratio microstructures can be formed. At the irradiated areas the adhesion [30], elastic modulus [26,31] and the refractive index [32] change as well because of the ion irradiation induced chemical processes, depending on the applied ion energy and fluence. Due to these effects, functionalised microstructures with adjustable physicochemical properties can be realized with this resist material by applying certain irradiation conditions, which would be a great advance for specific applications.…”

Section: Introductionmentioning

confidence: 99%

Direct formation of high aspect ratio multiple tilted micropillar array in liquid phase PDMS by proton beam writing

Huszánk

Rajta

Cserháti

2015

European Polymer Journal

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Direct e-beam lithography of PDMS

Cited by 25 publications

References 13 publications

The Functional Response of Mesenchymal Stem Cells to Electron‐Beam Patterned Elastomeric Surfaces Presenting Micrometer to Nanoscale Heterogeneous Rigidity

The Functional Response of Mesenchymal Stem Cells to Electron‐Beam Patterned Elastomeric Surfaces Presenting Micrometer to Nanoscale Heterogeneous Rigidity

Mechanically Tunable Bilayer Composite Grating for Unique Light Manipulation and Information Storage

Direct formation of high aspect ratio multiple tilted micropillar array in liquid phase PDMS by proton beam writing

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