2009
DOI: 10.1088/0022-3727/42/11/115418
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Direct evidence by positron annihilation spectroscopy of defect distributions deeper thanRpin Ar+implanted silica glass

Abstract: Positron annihilation spectroscopy was used to depth profile the modification of intrinsic structural nanovoids in silica glass implanted with Ar+ ions at different fluences and implantation energies. Beyond an expected defect distribution below the ion projected range Rp, a second defect distribution extending more than two times deeper than Rp was revealed. This second defective layer was found to be related to recoiled oxygen atoms whose diffusion is probably increased by the stress gradient induced by the … Show more

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Cited by 12 publications
(10 citation statements)
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“…So far the slow positron beam technique was applied to detection of defect range in implanted samples [11,12]. Mazzoldi et al studied silica glass implanted by Ar + ions of energy 30 keV using this technique [11].…”
Section: Introductionmentioning
confidence: 99%
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“…So far the slow positron beam technique was applied to detection of defect range in implanted samples [11,12]. Mazzoldi et al studied silica glass implanted by Ar + ions of energy 30 keV using this technique [11].…”
Section: Introductionmentioning
confidence: 99%
“…Mazzoldi et al studied silica glass implanted by Ar + ions of energy 30 keV using this technique [11]. They found defect distribution extending more than twice deeper than ion range.…”
Section: Introductionmentioning
confidence: 99%
“…In insulators with open volumes, i.e., a region with low electron density, e þ can also form positronium (Ps), an e þ -e − bound state. This process is very effective in v-SiO 2 where up to 80% of the implanted e þ forms positronium [20]. Ps exists in two spin states: the singlet state parapositronium (pPs, lifetime in vacuum τ p ¼ 125 ps) and the long living triplet state orthopositronium (oPs, lifetime in vacuum τ o ¼ 142 ns).…”
mentioning
confidence: 99%
“…To understand the origin of the observed Ps increase, PALS measurements were carried out on the capped sample. In Fig.2 the three achieved lifetimes are reported as a function of E. Beyond the TiO 2 capping layer, E > 3 keV, the lifetimes are constant: τ 1 , due to an average of p-Ps self-annihilation and e + free annihilations in Si, results ≅ 200 ps [24], τ 2 , coming from the annihilation of e + trapped in the bulk silica layer at the nanochannels surface, is ≅ 420 ps [25] and τ 3 , due to o-Ps pick-off annihilation, is ≅ 48 ns. At E < 3 keV τ 3 is due to Ps annihilating in open volume in the TiO 2 capping layer while τ 1 , that reaches ≅ 250 ps, is compatible with e + lifetime in amorphous TiO 2 [26].…”
mentioning
confidence: 99%