Direct evidence of reactive ion etching induced damages in Ge2Sb2Te5 based on different halogen plasmas

Li, Juntao; Xia, Yangyang; Liu, Bo; Ge, Feng; Zhang, Song; Gao, Dan; Xu, Zhen; Wang, Weiwei; Chan, Y.D.; Feng, Songlin

doi:10.1016/j.apsusc.2016.03.122

Cited by 23 publications

(8 citation statements)

References 20 publications

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“…[26,27] The precise pattern placement of phase-changing meta-atoms, however, is often challenging, especially at the nanoscale due to the limitations of etching processes on inorganic material systems. [28,29] Nanoscale patterning of the material components is critical to realize dynamic metasurfaces that can modulate the plasmonic resonance continuously from microwave to visible ranges. [30,31] Recently, active nanoplasmonic devices based on metal hybrids (e.g., MgH 2 and TiH 2 ) switched their optical properties in response to hydrogen exposure and achieved full-color rendering, but additional infrastructure to control and measure the safe flow of hydrogen is inevitable.…”

Section: Introductionmentioning

confidence: 99%

Hydrogel‐Based, Dynamically Tunable Plasmonic Metasurfaces with Nanoscale Resolution

Zhang

Dai

et al. 2022

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Flat metasurfaces with subwavelength meta‐atoms can be designed to manipulate the electromagnetic parameters of incident light and enable unusual light–matter interactions. Although hydrogel‐based metasurfaces have the potential to control optical properties dynamically in response to environmental conditions, the pattern resolution of these surfaces has been limited to microscale features or larger, limiting capabilities at the nanoscale, and precluding effective use in metamaterials. This paper reports a general approach to developing tunable plasmonic metasurfaces with hydrogel meta‐atoms at the subwavelength scale. Periodic arrays of hydrogel nanodots with continuously tunable diameters are fabricated on silver substrates, resulting in humidity‐responsive surface plasmon polaritons (SPPs) at the nanostructure–metal interfaces. The peaks of the SPPs are controlled reversibly by absorbing or releasing water within the hydrogel matrix, the matrix‐generated plasmonic color rendering in the visible spectrum. This work demonstrates that metasurfaces designed with these spatially patterned nanodots of varying sizes benefit applications in anti‐counterfeiting and generate multicolored displays with single‐nanodot resolution. Furthermore, this work shows system versatility exhibited by broadband beam‐steering on a phase modulator consisting of hydrogel supercell units in which the size variations of constituent hydrogel nanostructures engineer the wavefront of reflected light from the metasurface.

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Section: Introductionmentioning

confidence: 99%

Hydrogel‐Based, Dynamically Tunable Plasmonic Metasurfaces with Nanoscale Resolution

Zhang

Dai

et al. 2022

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“…The XPS in Figure c demonstrates the Al 2p and Cl 2p are presented in the charged product. The existence of the TeCl 3 AlCl 4 compound is evident from the binding energy shift of the Te 3d 5/2 and Te 3d 3/2 peaks from 573.1 and 583.5 eV to 576.5 and 586.8 eV, corresponding to Te 4+ . − Other residuals of Te 3d 5/2 and Te 3d 3/2 at 573.1 and 583.5 eV indicate that the intermediate of Te 4 (AlCl 4 ) 2 is not completely oxidized to TeCl 3 AlCl 4 . Then, discharging leads to the recovery of Te 3d peak but with Al 2p and Cl 2p peaks, probably caused by a small amount of trapped species.…”

Section: Resultsmentioning

confidence: 99%

A Rechargeable Al–Te Battery

Jiao

Tian

et al. 2018

ACS Appl. Energy Mater.

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Rechargeable aluminum based batteries attract particular attention due to their high anode capacity, safety, and cost advantage. Recently, high discharge voltage, ultrahigh rate performance, and long cycle life of aluminum ion batteries have been reported. However, the capacity of these Al-based batteries is limited, and it is of great value to explore novel cathodes with high reversible capacity that can rival a rechargeable lithium ion battery. In this work, we present the redox process of a tellurium electrode in a Lewis acidic AlCl3/[EMIm]Cl room temperature ionic liquid and disclose, for the first time, that the tellurium not only can be reduced to Te2– but also can be oxidized to TeCl3 +, and the whole process is reversible. Subsequently, we successfully construct a rechargeable Al–Te battery with an initial reversible capacity of ∼913 mAh/g, which is close to the theoretical capacity of tellurium of ∼1260.27 mAh/g and an obvious discharge voltage plateau at ∼1.5 V, already approaching that of a Li–Te battery (1.7 V). Significantly, this work brings a new way to reconsider the reaction mechanism and the theoretical capacities of chalcogen and its compounds as the cathode of the aluminum based batteries in room temperature chloroaluminate melts. For instance, the theoretical capacity of the sulfur is an unprecedented 5015.09 mAh/g when it undergoes a similar reversible redox process from S2– to SCl3 +.

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“…The transmittance of electrochromic films can also be real-time tuned by applying an external electrical field, though additional design of circuits is needed to integrate the active films with capacitor electrodes [31,32]. What is more, dynamic and high-resolution multicolor display requires configurable 3D-fabrication techniques in nanoscale, and the feasible patterning and etching processes for the inorganic materials are still limited due to their resistant chemical composition [33].…”

Section: Introductionmentioning

confidence: 99%

Dynamic transmission-reflection dichroism based on humidity-responsive metal-hydrogel-metal nanocavities

Wang

Ying

et al. 2022

EPJ Appl. Metamat.

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“Lycurgus cup” effect, referring dichroism between reflection and transmission modes of the same structures, is a peculiar phenomenon of multi-faceted display in structural color. Beyond the static dichrotic display, the realization of dynamic dichroism desires active materials and tunable structures, and owns the great demand from smart display, anti-counterfeiting and environmental sensing. We hereby propose a metal-hydrogel-metal (MHM) nanocavity for dynamic dichrotic display. This structure includes thin silver layers to induce the partial transmission with the existing reflection, and a polyvinyl alcohol (PVA) hydrogel layer owning the swelling/deswelling deformability to humidity change. The following experimental measurements and theoretical analysis prove that the reflection and transmission modes exist at distinct wavelengths, and the swelling hydrogel layer by humidity change between 10 and 90% RH can dynamically modulate the dichrotic resonance with the wavelength shift over 100 nm. Such environmental-sensitive and real-time tunable dichroism with hydrogel-based structural color is then verified for multi-color printing, resolution test, and cycling test.

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Direct evidence of reactive ion etching induced damages in Ge2Sb2Te5 based on different halogen plasmas

Cited by 23 publications

References 20 publications

Hydrogel‐Based, Dynamically Tunable Plasmonic Metasurfaces with Nanoscale Resolution

Hydrogel‐Based, Dynamically Tunable Plasmonic Metasurfaces with Nanoscale Resolution

A Rechargeable Al–Te Battery

Dynamic transmission-reflection dichroism based on humidity-responsive metal-hydrogel-metal nanocavities

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