Direct fabrication of microstructures on metal roller using stepped rotating lithography and electroless nickel plating

Huang, Tseng-Chieng; Wu, Junduan; Yang, Sen‐Yeu; Huang, Po‐Hsun; Chang, Shuo-Hung

doi:10.1016/j.mee.2009.01.008

Cited by 36 publications

(21 citation statements)

References 10 publications

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“…Because of the serial characteristic of these processes, however, the size of the mask and throughput can be constrained, and the equipment is also usually expensive. Other than direct methods, modified LIGA processes [ 74 , 75 ] use flexible covering as pattern and variants of lithographic methods [ 76 , 77 ] adapt intermittent UV exposure to pattern periodic features on roller surfaces. Dedicated equipment is less demanding in these methods.…”

Section: Mould or Master Manufacturementioning

confidence: 99%

“…A variety of different approaches have been demonstrated. For patterning onto the roller directly, Huang et al [ 76 ] and Wu et al [ 77 ] used a modified LIGA process with dip coating to coat photoresist onto the roller, exposed with stepped-rotating lithography, and electroless nickel plating on an aluminium roller. Jiang et al [ 88 ] attached a dry film resist to the roller surface, exposed with a flexible mask, and wet-etched to create micro grooves on a copper roller.…”

Section: Mould or Master Manufacturementioning

confidence: 99%

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Fabrication Methods for Microfluidic Devices: An Overview

2021

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Microfluidic devices offer the potential to automate a wide variety of chemical and biological operations that are applicable for diagnostic and therapeutic operations with higher efficiency as well as higher repeatability and reproducibility. Polymer based microfluidic devices offer particular advantages including those of cost and biocompatibility. Here, we describe direct and replication approaches for manufacturing of polymer microfluidic devices. Replications approaches require fabrication of mould or master and we describe different methods of mould manufacture, including mechanical (micro-cutting; ultrasonic machining), energy-assisted methods (electrodischarge machining, micro-electrochemical machining, laser ablation, electron beam machining, focused ion beam (FIB) machining), traditional micro-electromechanical systems (MEMS) processes, as well as mould fabrication approaches for curved surfaces. The approaches for microfluidic device fabrications are described in terms of low volume production (casting, lamination, laser ablation, 3D printing) and high-volume production (hot embossing, injection moulding, and film or sheet operations).

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Section: Mould or Master Manufacturementioning

confidence: 99%

Section: Mould or Master Manufacturementioning

confidence: 99%

Fabrication Methods for Microfluidic Devices: An Overview

2021

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“…93 Photoresist was coated onto a diamond turned aluminum roller with a nickel seed layer by dip coating. For example, Huang et al combined stepped rotating lithography and electroless nickel plating to fabricate microstructures directly on a roller.…”

Section: B Seamless Roller Mold Fabrication Techniquesmentioning

confidence: 99%

Recent developments and design challenges in continuous roller micro- and nanoimprinting

Dumond

Low

2011

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

103

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Articles you may be interested inContinuous and scalable fabrication of flexible metamaterial films via roll-to-roll nanoimprint process for broadband plasmonic infrared filtersAs an emerging technology for the manufacture of micro-and nano-scale patterns, continuous imprinting; otherwise known as roll-to-roll or roller imprinting, is attracting interest from researchers around the world because of its inherent advantages of low cost, high throughput, large area patterning. This technology is an evolutionary advance on the more traditional nanoimprint lithography developed in the 1990s, which is considered a batch mode, or dis-continuous patterning approach. In recent years, a number of commercial applications have been discovered which require low cost, large area patterning, particularly displays, optical coatings and films, and biological applications such as anti-fouling surfaces and micro-fluidic devices. This review covers a variety of continuous imprinting approaches, highlights challenges, and surveys progress towards high speed production of micro-and nanoscale features for these applications and others using this platform technology.

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“…black-infused-PDMS elastomeric masks [7], a combination of PDMS mold and copper electroplating [8], lithography using a flexible film mask [9], and stepped rotating lithography using a metal roller [10,11]. Compared to laser lithography, these techniques have a higher throughput and do not impose restrictions in terms of equipment and process complications.…”

Section: Introductionmentioning

confidence: 99%