2021
DOI: 10.1002/admt.202100280
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Direct Fabrication of VIA Interconnects by Electrohydrodynamic Printing for Multi‐Layer 3D Flexible and Stretchable Electronics

Abstract: Multi‐layer electrical interconnects are critical for the development of integrated soft wearable electronic systems, in which functional devices from different layers need to be connected together by vertical interconnects. In this work, electrohydrodynamic (EHD) printing technology is studied to achieve multi‐layer flexible and stretchable electronics by direct printing vertical interconnects as vertical interconnect accesses (VIAs) using a low‐melting‐point metal alloy. The EHD printed metallic vertical int… Show more

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Cited by 33 publications
(25 citation statements)
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“…Ren et al used low-melting-point metal ink, Field's Metal (32.5% Bismuth, 51% Indium, 16.5% Tin), to print vertical interconnect accesses (VIAs) using the electrohydrodynamic printing technology to form vertical interconnects. [147] A two-layer circuit overlapped over the same area was interconnected by the printed VIAs and was connected to a battery to light a LED as shown in (Figure 8h). The circuit remained conductive even when the device was bent, stretched, and twisted.…”
Section: Interconnectsmentioning
confidence: 99%
See 1 more Smart Citation
“…Ren et al used low-melting-point metal ink, Field's Metal (32.5% Bismuth, 51% Indium, 16.5% Tin), to print vertical interconnect accesses (VIAs) using the electrohydrodynamic printing technology to form vertical interconnects. [147] A two-layer circuit overlapped over the same area was interconnected by the printed VIAs and was connected to a battery to light a LED as shown in (Figure 8h). The circuit remained conductive even when the device was bent, stretched, and twisted.…”
Section: Interconnectsmentioning
confidence: 99%
“…Copyright 2021, American Association for the Advancement of Science. h) Reproduced with permission [147]. Copyright 2021, Wiley-VCH.…”
mentioning
confidence: 99%
“…The development of tactile-sensing systems is affected by a large number of challenges and constraints [ 56 , 60 ]. One of these regards the fabrication of vertical vias in multi-layered tactile devices, in which functional devices from different layers need to be connected by vertical interconnects [ 61 ]. Some works addressed the problem by manually creating vertical feedthrough (creating holes and metallizing them), during or even after device fabrication [ 62 , 63 ].…”
Section: Requirements and Challenges In Tactile Sensor Designmentioning
confidence: 99%
“…Finally, a major challenge is the possibility of a direct printing of sensors on the target surfaces by exploiting the state of the art of robotic technologies. The problem of vias fabrication is critical, especially in multilayered tactile devices, in which functional devices from different layers need to be connected together by vertical interconnects [ 61 ].…”
Section: Open Problemsmentioning
confidence: 99%
“…However, the surface tension of the liquid metal must be overcome when injecting liquid metal into the channels of the template, which brings difficulty to the manufacturing of multilayer stretchable electronics. Ren et al [22] provided a method of printing liquid metal interconnection wires to efficiently manufacture multilayer devices. The manufacturing process requires strict temperature control and the combined action of air pressure and electric field.…”
mentioning
confidence: 99%