2013
DOI: 10.1007/s00340-013-5350-4
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Direct femtosecond laser fabrication of antireflective layer on GaAs surface

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Cited by 42 publications
(16 citation statements)
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“…Multi shot (N ≈ 3-10 3 pulses) fs laser dry nano structuring of an atomically smooth Si(100) commer cial wafer surface by the linearly polarized 744 nm fs laser pulses resulted in one dimensional surface grat ings with their ridges perpendicular to the laser polar ization vector (the "normal" gratings [23,52]) and the periods Λ 744 , varying depending on N and F. The observed cumulative dependence Λ(N) is well known [53][54][55], with the corresponding ripple periods Λ decreasing by 30% for larger N due to the resulting increase in the ripple depth [55]. By contrast, the flu ence dependence is more related to photo excitation conditions, exhibiting Λ 744, min (N ≈ 100) = 0.42 ± 0.01 μm at the local fluence F ≈ 0.15 J/cm 2 (Fig.…”
Section: Surface Nanostructuringmentioning
confidence: 99%
“…Multi shot (N ≈ 3-10 3 pulses) fs laser dry nano structuring of an atomically smooth Si(100) commer cial wafer surface by the linearly polarized 744 nm fs laser pulses resulted in one dimensional surface grat ings with their ridges perpendicular to the laser polar ization vector (the "normal" gratings [23,52]) and the periods Λ 744 , varying depending on N and F. The observed cumulative dependence Λ(N) is well known [53][54][55], with the corresponding ripple periods Λ decreasing by 30% for larger N due to the resulting increase in the ripple depth [55]. By contrast, the flu ence dependence is more related to photo excitation conditions, exhibiting Λ 744, min (N ≈ 100) = 0.42 ± 0.01 μm at the local fluence F ≈ 0.15 J/cm 2 (Fig.…”
Section: Surface Nanostructuringmentioning
confidence: 99%
“…A periodicity of about the wavelength λ of the laser radiation is commonly observed, which are usually called as ripples or laser-induced periodic surface structures (LIPSS). It should be noted that such LIPSS show water-repellent properties [12,[27][28][29], diffusive reflection [30][31][32][33][34], and friction change [35][36][37][38]. The spatial periodicity of low-spatial frequency LIPSS (LSFL) is known to be approximately laser wavelength dependent, and the LSFL is mainly orientated perpendicular to the direction of the laser polarization.…”
Section: Femtosecond Laser-induced Surface Structuresmentioning
confidence: 99%
“…On the contrary, under multipulse exposition N ӷ 10, forming ripples with amplitude modulation h of several hundred nanometers (h/λ ≤ 1), the experimen tally observed values of the periods of ripples lie in the range Λ = λ/(1.3-1.7) [2,3,5,15,16]. It is worth not ing that such significantly subwavelength values of the periods of ripples were observed even under conditions where the wavelength of SPP on a smooth surface was almost equal to the wavelength of the incident radia tion [5,15,16].…”
Section: Introductionmentioning
confidence: 99%
“…Femtosecond laser induced formation of ripples has successfully been used for color marking [1], antireflection [2,3] and local chemical modification [3,4] of surfaces, SERS [5], etc. However, it is worth noting that a comprehen sive theoretical model that enables one to predict the evolution of ripples on different materials under pre determined experimental conditions still has not been developed.…”
Section: Introductionmentioning
confidence: 99%