Direct generation of a stable multi-beam pulsed 355 nm UV laser based on a micro-lens array

Abstract

Multi-beam laser processing is a very popular method to improve processing efficiency. For this purpose, a compact and stable multi-beam pulsed 355 nm ultraviolet (UV) laser based on a micro-lens array (MLA) is presented in this Letter. It is worth noting that the MLA is employed to act as the spatial splitter as well as the coupling lens. With assistance of the MLA, the 1064 nm laser and 532 nm laser are divided into four sub-beams and focused at different areas of the third-harmonic generation (THG) crystal. As a result, the multi-beam pulsed 355 nm UV laser is successfully generated inside the THG crystal. The measured pulse widths of four sub-beams are shorter than 9 ns. Especially, the generated four sub-beams have good long-term power stability benefitting from the employed MLA. We believe that the generated stable multi-beam 355 nm UV laser can meet the requirement of high-efficiency laser processing, and the presented method can also pave the way to generate stable and long-lived multi-beam UV lasers.