Direct growth of mm-size twisted bilayer graphene by plasma-enhanced chemical vapor deposition

Chen, Yen-Chun; Lin, Wei Hsiang; Tseng, W. F.; Chen, Chien‐Chang; Rossman, George R.; Chen, Chii Dong; Wu, Yu Shu; Yeh, N.-C.

doi:10.1016/j.carbon.2019.09.052

Cited by 40 publications

(33 citation statements)

References 115 publications

(196 reference statements)

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“…The twisted graphene layers are formed on the surface of crystalline graphite naturally due to the accidental folding of graphene layers onto other graphene flakes or themselves [ 66 , 67 ]. Several techniques have been reported for preparing graphene sheets, such as chemical exfoliation from bulk graphite [ 68 ], micromechanical cleavage of highly ordered pyrolytic graphite (HOPG) [ 69 ], chemical reduction of chemically exfoliated graphene oxide [ 70 ], solid-state graphitization or thermal decomposition of SiC [ 71 , 72 ], and thermal and plasma-enhanced chemical vapor deposition [ 73 , 74 ]. Every technique has its own set of advantages and disadvantages.…”

Section: Synthesis Methodsmentioning

confidence: 99%

Opportunities and Challenges in Twisted Bilayer Graphene: A Review

2020

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HIGHLIGHTS • This article presents an overview of twisted bilayer graphene (tBLG) on their fabrication techniques and twisting angle-dependent properties. • The properties of tBLG can be controlled by controlling the twisting angle between two graphene sheets. ABSTRACT Two-dimensional (2D) materials exhibit enhanced physical, chemical, electronic, and optical properties when compared to those of bulk materials. Graphene demands significant attention due to its superior physical and electronic characteristics among different types of 2D materials. The bilayer graphene is fabricated by the stacking of the two monolayers of graphene. The twisted bilayer graphene (tBLG) superlattice is formed when these layers are twisted at a small angle. The presence of disorders and interlayer interactions in tBLG enhances several characteristics, including the optical and electrical properties. The studies on twisted bilayer graphene have been exciting and challenging thus far, especially after superconductivity was reported in tBLG at the magic angle. This article reviews the current progress in the fabrication techniques of twisted bilayer graphene and its twisting angle-dependent properties. Optical absorption Chemical reactivity S u p e r c o n d u c t iv it y v a n H o v e s in g u la r it ie s Gb a n d r e s o n a n c e In t e r la y e r c o u p li n g

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Section: Synthesis Methodsmentioning

confidence: 99%

Opportunities and Challenges in Twisted Bilayer Graphene: A Review

2020

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“…Microwave plasma (MW)-PECVD is schematically shown in Figure 12. Chen et al used MW-PECVD to synthesise single-crystalline hexagonal bilayer graphene (BLG) in one step with a controlled twist angle between the layers by controlling the ratio of the partial pressure of the reactive gases H2 (PH2) and CH4 (PCH4) (PCH4/PH2) [97]. Mehedi et al investigated an extended space of parameters as they studied the effect of growth temperature, the molar concentration of the hydrocarbon feedstock (CH4), deposition time and microwave power on the growth process of graphene on cobalt (Co) substrate.…”

Section: Microwave Plasmamentioning

confidence: 99%

Chemical Vapour Deposition of Graphene—Synthesis, Characterisation, and Applications: A Review

et al. 2020

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Graphene as the 2D material with extraordinary properties has attracted the interest of research communities to master the synthesis of this remarkable material at a large scale without sacrificing the quality. Although Top-Down and Bottom-Up approaches produce graphene of different quality, chemical vapour deposition (CVD) stands as the most promising technique. This review details the leading CVD methods for graphene growth, including hot-wall, cold-wall and plasma-enhanced CVD. The role of process conditions and growth substrates on the nucleation and growth of graphene film are thoroughly discussed. The essential characterisation techniques in the study of CVD-grown graphene are reported, highlighting the characteristics of a sample which can be extracted from those techniques. This review also offers a brief overview of the applications to which CVD-grown graphene is well-suited, drawing particular attention to its potential in the sectors of energy and electronic devices.

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“…Usually, CVD technique can realize the growth of tBLG made up of two layers of hexagonal single‐crystal graphene with straight edges. [ 129 ] 2) The diffraction pattern of tBLG to reveal the twist angle. For monolayer graphene, there is only a set of diffraction spots with hexagonal shape.…”

Section: The Establishment Of Twist Anglementioning

confidence: 99%

Section: The Establishment Of Twist Anglementioning

confidence: 99%

Fabrication Strategies of Twisted Bilayer Graphenes and Their Unique Properties

Cai

2021

Advanced Materials

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Therefore, graphene becomes a rising star on the horizon of materials science. Since the first report of centimeter-scale single-crystal graphene by Ruoff group showed high electrical quality, [9] great achievements have been made in the fabrication of high-quality graphene for the application in electronic devices, including single-crystalline graphene flakes, [10,11] super-ordered graphene structures, [12,13] super-clean graphene films, [14-16] and ultra-flat graphene films. [17] However, the zero-bandgap feature for monolayer graphene has limited its potential applications in semiconductors. In addition, the negligible mass, low yield, and high production costs of graphene are insurmountable bottlenecks for the practical application in energy conversion and storage. In particular, the absence of killer applications leads to the increased difficulty in graphene commercialization. [18,19] Nevertheless, it is undeniable that the unique structure of graphene has sparked intense interest in condensed matter physics, such as fractional quantum Hall effects, [17] proton permeation, [20] and plasmons. [21] More interestingly, twisted bilayer graphene (tBLG), which is similar to the van der Waals heterostructures, has a dramatic effect on the electronic properties. [22,23] The relative rotating graphene layers become a powerful model to study topological physical properties, including ferromagnetism, [24] Mott insulating behavior and superconducting behaviors, [25,26] topological valley transport, [27] van Hove singularities, [28] and tunable bandgap. [29] Consequently, the twisted structure of tBLG has triggered tremendous enthusiasm, even inspiring the formation of a new field for twisted 2D materials. Currently, production methods of tBLG contain chemical vapor deposition (CVD) on metal catalysts; [30] epitaxial growth on SiC substrate; [31] folding monolayer graphene, [32] and stacking monolayer graphene. [33] These methods are divided into two categories: direct growth and manual assembly. Generally, the direct growth of tBLG undergoes an in situ rearrangement of carbon atoms in the non-equilibrium state at high temperatures, whereas the ex situ vertical overlap of monolayer graphene by transfer process is the basic principle for manual assembly. The completely different preparation processes give rise to the distinctive advantages and disadvantages, but precise control over twist angle and super-clean interface are the ultimate pursuits for any preparation method. Recent progress in Twisted bilayer graphene (tBLG) exhibits a host of innovative physical phenomena owing to the formation of moiré superlattice. Especially, the discovery of superconducting behavior has generated new interest in graphene. The growing studies of tBLG mainly focus on its physical properties, while the fabrication of high-quality tBLG is a prerequisite for achieving the desired properties due to the great dependence on the twist angle and the interfacial contact. Here, the cutting-edge preparation strategies and challenges of tBLG fabrica...

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Direct growth of mm-size twisted bilayer graphene by plasma-enhanced chemical vapor deposition

Cited by 40 publications

References 115 publications

Opportunities and Challenges in Twisted Bilayer Graphene: A Review

Opportunities and Challenges in Twisted Bilayer Graphene: A Review

Chemical Vapour Deposition of Graphene—Synthesis, Characterisation, and Applications: A Review

Fabrication Strategies of Twisted Bilayer Graphenes and Their Unique Properties

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