“…A large number of researchers have contributed various improvements to the technique. These include: 1 The use of pulsed X-ray sources for flash imaging, including plasma pinch X-ray generators , laser-produced plasmas (Rosser et al, 1985;Tomie et al, 1991;Stead et al, 1993;Kinjo et al, 1994), and X-ray lasers (Skinner et al, 1990). 2 Improved methods for resist readout which include direct TEM enlargement (Feder et al, 1981;Cheng et al, 1986;Howells et al, 1987), TEM enlargement of surface replicas (Shinohara et al, 1986;Cheng, 1987), and atomic force microscopy (Tomie et al, 1991;Lindaas et al, 1992;Cotton et al, 1994;Howells et al, 1994).…”