Abstract:Micro-thermoelectric modules can be used to develop unique components such as energy harvesters, active coolers, and thermal sensors in various integrated systems. However, the manufacturing of these modules still relies on costly traditional micro-fabrication processes, producing only two-dimensional (2D) thermoelectric films. This limitation severely constrains temperature gradient formation across thermoelectric films, and hence, the sufficient amount of power required to run integrated systems is not gener… Show more
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