Direct laser write lithography for high optical quality electrowetting prisms
Eduardo J. Miscles,
Mo Zohrabi,
Juliet T. Gopinath
et al.
Abstract:This study demonstrates the fabrication and evaluation of a monolithic electrowetting prism with a minimized electrode gap. The electrically tunable prism is capable of two-dimensional beam steering of approximately ±4 degrees under voltage differentials up to ±15 V. The main innovation lies in reducing the electrode gap to 30 μm, accomplished using direct write laser lithography on three dimensional substrates. Through simulations and experimental validation, we show that reducing the gap between electrodes t… Show more
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