2001
DOI: 10.1117/1.1367348
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Direct laser writing of mid-infrared microelements on polyethylene material

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Cited by 10 publications
(5 citation statements)
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“…There have been many techniques to fabricate micro-lens array, including thermal reflow [9], laser ablation [10], direct laser writing [11], ink-jet printing [12], and gray-scale mask methods [13]. However, there are still some drawbacks of these techniques.…”
Section: Introductionmentioning
confidence: 99%
“…There have been many techniques to fabricate micro-lens array, including thermal reflow [9], laser ablation [10], direct laser writing [11], ink-jet printing [12], and gray-scale mask methods [13]. However, there are still some drawbacks of these techniques.…”
Section: Introductionmentioning
confidence: 99%
“…All above-mentioned applications demand precise positioning of the microlenses; thus there are clear advantages in piezoelectric substrates allowing precise displacement of the microlens. Microlenses are currently produced by different technologies: micromolding [17], local melting of glass by CO 2 laser [18], microplastic embossing process [19,20], argon ion-beam etching [21] or direct laser writing [7]. We established that PVDF is highly suitable for direct IR laser writing of cylindrical and pseudo-spherical microlenses.…”
Section: Introductionmentioning
confidence: 99%
“…Different groups have recently used polymer materials for the fabrication of spherical microlenses recently [7][8][9][10]. The novelty of our approach lies in the fact that PVDF demonstrates strong piezoelectric properties [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Microlens arrays (MLAs) have been investigated and applied for many years in various application areas, including optical fibers, CMOS image sensors, illumination systems, wavefront sensors, gray-scale lithography, etc [1][2][3][4][5][6]. The most commonly used materials for MLAs are polymers, such as SU-8, photoresist, polymethyl methacrylate (PMMA), and polydimethylsiloxane (PDMS) for visible light bands [7,8], and polytetrafluoroethylene, polyethylene, polystyrene, and polypropylene for infrared bands [9][10][11]. Polymers normally have high transmissivity at their applicable bands, and can be fabricated into MLAs readily using thermal reflow [12][13][14].…”
Section: Introductionmentioning
confidence: 99%