2019
DOI: 10.1007/s00542-019-04549-2
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Direct laser writing to fabricate capacitively transduced resonating sensor

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Cited by 2 publications
(2 citation statements)
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“…For example, in case of IDE processed using a silicon-based technology, the lines and spaces widths are typically a few µm. Meanwhile, such features are significantly larger, at least in the tens of microns range, if processed using PCB based manufacturing technologies, as by laser ablation for example [ 94 , 95 ].…”
Section: Materials Considerationmentioning
confidence: 99%
“…For example, in case of IDE processed using a silicon-based technology, the lines and spaces widths are typically a few µm. Meanwhile, such features are significantly larger, at least in the tens of microns range, if processed using PCB based manufacturing technologies, as by laser ablation for example [ 94 , 95 ].…”
Section: Materials Considerationmentioning
confidence: 99%
“…It proved the applicability of the device as a two-degree-of-freedom resonant mode positioning sensor using weak electrostatic coupling. e sensor has sensitivity based on vibration amplitude to respond to relative changes in stiffness and can solve the order of least stiffness perturbation [6]. Laser sensor technology has been created and used in many fields, but its integration with the news dissemination field has not yet received widespread attention.…”
Section: Introductionmentioning
confidence: 99%