Surface
states that induce depletion regions are commonly believed
to control the transport of charged carriers through semiconductor
nanowires. However, direct, localized optical, and electrical measurements
of ZnO nanowires show that native point defects inside the nanowire
bulk and created at metal–semiconductor interfaces are electrically
active and play a dominant role electronically, altering the semiconductor
doping, the carrier density along the wire length, and the injection
of charge into the wire. We used depth-resolved cathodoluminescence
spectroscopy to measure the densities of multiple point defects inside
ZnO nanowires, substitutional Cu on Zn sites, zinc vacancy, and oxygen
vacancy defects, showing that their densities varied strongly both
radially and lengthwise for tapered wires. These defect profiles and
their variation with wire diameter produce trap-assisted tunneling
and acceptor trapping of free carriers, the balance of which determines
the low contact resistivity (2.6 × 10–3 Ω·cm–2) ohmic, Schottky (Φ ≥ 0.35 eV) or blocking
nature of Pt contacts to a single nano/microwire. We show how these
defects can now be manipulated by ion beam methods and nanowire design,
opening new avenues to control nanowire charge injection and transport.