Abstract:We have developed a new scanning probe microscopy -based technique, scanning differential spreading resistance microscopy (SDSRM) and applied it to profile the free carrier distribution inside operating optoelectronic devices. The results of our SDSRM study of multi-quantum-well (MQW) buried heterostructure (BH) lasers under zero and forward biases are presented. SDSRM scans with high spatial resolution over the MQW active region of a BH laser yielded quantum-well-resolving differential spreading resistance me… Show more
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