Ultrafast lasers provide an outstanding processing quality but their main drawback is the low removal rate per pulse compared to longer pulses. This limitation could be overcome by increasing both average power and repetition rate. In this paper, we report on the influence of high repetition rate and pulse duration on both ablation efficiency and processing quality on metals. All trials have been performed with a single tunable ultrafast laser (350 fs to 10ps).
IntroductionScaling up ultrafast laser processing requires improving throughput, using high average power and high repetition rate [1], while maintaining the good processing quality. Depositing more energy into the target could increase ablation efficiency [2], thanks to heat accumulation [3], but could as well introduce detrimental effect on processing quality [2]. Finally, the response of the material highly depends on its thermo-physical properties and its capacity to cope with the thermal load.The purpose of the present paper is to identify both potentials and limitations using a high average power (up to 34W) and high repetition rate (up to 2MHz) ultrafast laser in the range of 350fs to 10ps. We present comprehensive results on the influence of both repetition rate and pulse duration on ablation efficiency and processing quality on Aluminum, Copper and Molybdenum.