2015
DOI: 10.1017/s1431927615015111
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Direct-Writing of Cu Nano-Patterns with an Electron Beam

Abstract: We demonstrate direct electron beam writing of a nano-scale Cu pattern on a surface with a thin aqueous layer of CuSO4 solution. Electron beams are highly maneuverable down to nano-scales. Aqueous solutions facilitate a plentiful metal ion supply for practical industrial applications, which may require continued reliable writing of sophisticated patterns. A thin aqueous layer on a surface helps to confine the writing on the surface. For this demonstration, liquid sample holder (K-kit) for transmission electron… Show more

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Cited by 4 publications
(6 citation statements)
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“…Specimens in aqueous solution can be loaded into the chamber and then examined by an electron microscope. Previously, images of non-biological particles and living bacteria were successfully demonstrated with this microchip [3][4][5]. Sample preparation steps of this microchip are simpler and faster than those of traditional TEM.…”
Section: Introductionmentioning
confidence: 99%
“…Specimens in aqueous solution can be loaded into the chamber and then examined by an electron microscope. Previously, images of non-biological particles and living bacteria were successfully demonstrated with this microchip [3][4][5]. Sample preparation steps of this microchip are simpler and faster than those of traditional TEM.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, the layer thickness was not sensitive to the surfactant concentration either. Moreover, in our previous investigations, the LB solution 22 (1 wt% tryptone, 0.5 wt% sodium chloride, and 0.5 wt% yeast extract in DI water) and the 24 mM CuSO 4 solution 23 yielded water layer thicknesses of approximately 180 nm and 200 nm, respectively. These results provide evidence for the water layer thickness being independent of PS beads and its surfactant.…”
Section: Resultsmentioning
confidence: 83%
“… Medium High versatility, Ordered morphology, Medium controllability. [57] , [58] , [59] , [60] Anodization Metals Nanopores, Nanotubes. Very low (mostly TiO 2 ) Low versatility, Random or ordered morphologies, Medium controllability.…”
Section: Nanostructured Surfaces For Cardiovascular Applicationsmentioning
confidence: 99%
“…In addition, Lai et al. [60] used electron beam to obtain 70–280 nm Cu nanowires. The electron beam induced the Cu deposition on the surface of the substrate.…”
Section: Nanostructured Surfaces For Cardiovascular Applicationsmentioning
confidence: 99%
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