Directed Self-Assembly

Abstract

I would like to thank all the people who supported this work with their knowledge and time. Steve McCartney for teaching me electron microscopy, for his help in setting up the electron beam lithography tool and for giving me access to the microscope around the clock. Fred A. Mahone from the physics electronic shop for his quick response to my inquiries and for all the answers to my questions regarding the measurement equipment. Melvin Shaver, Scott Allen and John Miller from the physics machine shop for their help and input in building the setup. Dan Huff from the packaging lab for giving me access to the wirebonder. Dr. Hendricks and David Gray for the access to the clean room. Christopher Maxey for running the FEM simulation of the paddle resonators for me. Ben