Discharge characteristics of a needle-to-plate electrode at a micro-scale gap

Wang, Ronggang; Ji, Qizheng; Zhang, Tongkai

doi:10.1088/2058-6272/aaa436

Cited by 12 publications

(3 citation statements)

References 26 publications

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“…Resulting in the product of gas pressure and the discharge path length(ps) approximates the pd value associated with the minimum breakdown voltage, thus sustaining the minimum breakdown voltage [24,25].…”

Section: Introductionmentioning

confidence: 99%

The effect of micro-gap discharge paths on ionization coefficients and similarity theory

Zhang,

Zhao,

Wang

et al. 2024

Phys. Scr.

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In order to investigate the impact of discharge paths at the micrometer scale on breakdown, two sets of different electrodes were arranged with electrode gaps ranging from 10μm to 100μm and gas pressures varying from 1kPa to 100kPa. The research has revealed that without an insulating layer at the edge of the electrode, when the product of gas pressure (p) and electrode gap (d) is less than 60Pa·cm, the number of positive ions cannot satisfy the conditions for self-sustaining discharge at the electrode gap (d). As a result, the discharge path varies along a longer path (s) to satisfy the conditions for self-sustained discharge, thereby maintaining the minimum breakdown voltage. This long-path discharge mechanism affects the ionization coefficient, resulting in an inconsistency between the ionization coefficient ratio at different distances and their respective scale factor (k) values. Therefore, on a micrometer scale, changes in the path make the application of similarity theory no longer applicable.

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Section: Introductionmentioning

confidence: 99%

The effect of micro-gap discharge paths on ionization coefficients and similarity theory

Zhang,

Zhao,

Wang

et al. 2024

Phys. Scr.

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“…The results showed that field emission cannot be ignored in micro discharge, and the breakdown voltage seriously deviated from the Paschen relationship curve [8,9]. J T Ouyang's team, come from BIT, also studied the needle plate structure and found the relevant laws and mechanisms of discharge curve under micro gap [10,11].…”

Section: Introductionmentioning

confidence: 99%

Study on electrostatic discharge (ESD) characteristics of ultra-thin dielectric film

Wang¹,

Sun²,

He³

et al. 2022

Plasma Sci. Technol.

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Electrostatic discharge (ESD) event usually destroys the electrical properties of dielectric films, resulting in product failure. In this work, the breakdown characteristic of machine mode (MM) ESD on three different nano size films of head gimble assemble (HGA) are obtained experimentally. The breakdown voltage and thickness parameters show a positive proportional relationship, but they are generally very low and have large discrete characteristics (~30%). The maximum and minimum breakdown voltages of the tested samples are 1.08 V and 0.46 V, which are far lower than the requirement of current standard (25 V). In addition, the judgment criterion of product damage is given, and the relationship between discharge voltage polarity, initial resistance and breakdown voltage is studied. Finally, the theoretical analysis of breakdown characteristic law has been given.

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“…They attributed the "platform" area to the self-modulation effect. 23) Meng et al used the electro-optical measurement system and pulsed power supply to conduct gas discharge experiments ranging from 1 to 25 μm. They proved the applicability of the gas breakdown theory of DC power supply in micro-scale to the breakdown process of pulse power supply.…”

Section: Introductionmentioning

confidence: 99%

Analysis of gas discharge characteristics across micro-gap under different pressures

Li¹,

Sun²,

Sun³

et al. 2021

Jpn. J. Appl. Phys.

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To study the process of micro-gap gas discharge under different pressures, the experimental of the micro-discharges for the gaps ranging from 1 to 100 μm under 1-100 kPa is presented and the results are discussed. The curves of breakdown voltage with the pd value at different gaps are drawn and there are multiple breakdown voltages under the same pd value. As the decrease of the gaps, the deviation between the breakdown curve and the traditional Paschen curve increases when the electrode distance is less than 100 μm and the pd value is less than about 80 Pa•cm. The breakdown field strength and the ratio of effective secondary coefficient of field emission to Townsend's secondary coefficient are estimated at different pressures and different electrode gaps. The ion-enhanced field effect has been found to play an important role in field emission in several microns of electrode gaps.

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Discharge characteristics of a needle-to-plate electrode at a micro-scale gap

Cited by 12 publications

References 26 publications

The effect of micro-gap discharge paths on ionization coefficients and similarity theory

The effect of micro-gap discharge paths on ionization coefficients and similarity theory

Study on electrostatic discharge (ESD) characteristics of ultra-thin dielectric film

Analysis of gas discharge characteristics across micro-gap under different pressures

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