2006
DOI: 10.1063/1.2362631
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Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen

Abstract: Articles you may be interested inInfluence of oxygen traces on an atmospheric-pressure radio-frequency capacitive argon plasma discharge

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Cited by 25 publications
(21 citation statements)
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“…In addition, as indicated in previous studies, the discharge with many thin filaments or micro-discharges can transfer to a glow discharge in APDBD plasmas provided that there are enough seed electrons to turn on the discharge under a low electric field [1,2]. Based on the preceding discussions, if we define the gas which can be ignited directly to form the RF APGD plasma as the plasma-inducing gas, e.g., helium or argon, while on the other hand, the gas which cannot be used to generate the RF APGD plasma directly at the present time, e.g., air, nitrogen, oxygen, etc., as the plasma-forming gas, in this paper, the induced gas discharge approach can be expressed as [33,34]: first, generating a glow discharge plasma operating in a a and/or c mode after breakdown with the plasma-inducing gas (e.g., helium or argon); second, transferring the discharge mode to the c mode (or a-c co-existing mode) if the plasma operates in a pure a mode after breakdown by increasing the RF power input; third, increasing the flow rate of the plasma-forming gas (e.g., air, nitrogen, oxygen, etc.) to generate the c mode discharge with the plasma-inducing-forming gas mixture; decreasing the plasma-inducing gas flow rate, and finally, a stable glow discharge plasma operating in the c mode is obtained when no plasma-inducing gas is added into the plasma-forming gas any more.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…In addition, as indicated in previous studies, the discharge with many thin filaments or micro-discharges can transfer to a glow discharge in APDBD plasmas provided that there are enough seed electrons to turn on the discharge under a low electric field [1,2]. Based on the preceding discussions, if we define the gas which can be ignited directly to form the RF APGD plasma as the plasma-inducing gas, e.g., helium or argon, while on the other hand, the gas which cannot be used to generate the RF APGD plasma directly at the present time, e.g., air, nitrogen, oxygen, etc., as the plasma-forming gas, in this paper, the induced gas discharge approach can be expressed as [33,34]: first, generating a glow discharge plasma operating in a a and/or c mode after breakdown with the plasma-inducing gas (e.g., helium or argon); second, transferring the discharge mode to the c mode (or a-c co-existing mode) if the plasma operates in a pure a mode after breakdown by increasing the RF power input; third, increasing the flow rate of the plasma-forming gas (e.g., air, nitrogen, oxygen, etc.) to generate the c mode discharge with the plasma-inducing-forming gas mixture; decreasing the plasma-inducing gas flow rate, and finally, a stable glow discharge plasma operating in the c mode is obtained when no plasma-inducing gas is added into the plasma-forming gas any more.…”
Section: Resultsmentioning
confidence: 99%
“…Recently, a kind of RF APGD plasma of air operating steadily in a c mode with fixed initial gap spacings of 1.5-6.4 mm was reported using an induced gas discharge approach [33]. And the similar method was also subsequently employed to produce pure nitrogen RF APGD plasmas [34].…”
Section: Introductionmentioning
confidence: 98%
“…Energy is generated during the glow discharge/plasma cleaning procedure, which could clean the surface being exposed. 32,33 This has been proved to be useful in the sterilization of implants and various studies supporting the same have been reported. Radiofrequency glow discharge is much handy and convenient procedure than immersion disinfection and spray atomization, which are the most commonly used modes of disinfection for impression materials.…”
Section: Discussionmentioning
confidence: 93%
“…8 Using radio-frequency ͑rf͒ excitation with which gas breakdown voltage is low 9 and plasma stability is robust, 10 stable operation of Ar APGD has been reported usually as a jetlike plume suited for small-area processing applications. [11][12][13] Large-area Ar rf APGDs are much more difficult to achieve with the usual planar configuration of two parallel-plate bare electrodes, 14 and the few successful cases reported so far employ almost exclusively unconventional configurations. [15][16][17] In this letter, we report an experimental study of large-area Ar rf atmospheric glow discharges sustained between two parallel dielectrically insulated electrodes.…”
mentioning
confidence: 99%
“…The objectives of the work are to study ͑a͒ an alternative of producing large-area rf APGD in argon and ͑b͒ the generic characteristics of Ar rf APGDs in a simple electrode configuration that may be applicable to other electrode configurations. [11][12][13][14][15][16][17] The argon rf atmospheric discharge considered in this study was generated between two parallel stainless-steel plates each covered with a ceramic sheet of 0.5 mm in thickness and 9.0 in relative permittivity. Its electrode unit was enclosed in a Perspex box with an argon flow of 5 SLM ͑standard liters per minute͒ at 760 torr.…”
mentioning
confidence: 99%