Discharges with the evaporation of anode substance in vacuum

Saenko, V.A.; Borisenko, A.G.

doi:10.1109/deiv.2004.1418635

Search citation statements

Order By: Relevance

Paper Sections

Select...

Evaluation Of Sputtering Mechanism Parameters1

Citation Types

Supporting

Mentioning

Contrasting

Publication Types

Select...

Other1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…namely, the discharge voltage is 3.5-4 kV, Ar is taken as an ignition gas, cathodes are made of Ti, and the time interval, during which a density of about 2 × 10 19 m −3 is attained, is about 100 µs. The stage of discharge ignition will not be considered now, because such an analysis was carried out earlier (see, e.g., work [16]). First, let us consider the processes associated with the interaction between the plasma and the surface of a solid.…”

Section: Evaluation Of Sputtering Mechanism Parametersmentioning

confidence: 99%

Estimation of the Efficiency of Material Injection into the Reflex Discharge by Sputtering the Cathode Material

Kovtun,

Skibenko,

Skibenko

et al. 2012

Preprint

View full text Add to dashboard Cite

The processes of injection of a sputtered-and-ionized working material into the pulsed reflex discharge plasma have been considered at the initial stage of dense gas-metal plasma formation. A calculation model has been proposed to estimate the parameters of the sputtering mechanism for the required working material to be injected into the discharge. The data obtained are in good accordance with experimental results.

show abstract

Section: Evaluation Of Sputtering Mechanism Parametersmentioning

confidence: 99%