Discrimination and concentration measurement of different binary gas mixtures with a simple resonator through viscosity and mass density measurements

Iglesias, Luis E.; Boudjiet, Mohand-Tayeb; Dufour, Isabelle

doi:10.1016/j.snb.2019.01.070

Cited by 19 publications

(17 citation statements)

References 22 publications

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“…In the final step, a linear vector quantization (LVQ) ANN was used for successful discrimination of the two flavors. Iglesias et al used blank Si micro-cantilevers to discriminate and quantify H 2 , CO, CO 2 , CH 4 , He and O 2 diluted in nitrogen in percent ranges [439]. The physical sensing principle is based on the differences in the density and viscosity of these gases, which modify the resonant frequency and quality factor of the device upon environment composition.…”

Section: Unconventional Theoretical and Numerical Approaches To Sensomentioning

confidence: 99%

Gas sensors based on mass-sensitive transducers. Part 2: Improving the sensors towards practical application

Oprea

2020

Anal Bioanal Chem

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Section: Unconventional Theoretical and Numerical Approaches To Sensomentioning

confidence: 99%

Gas sensors based on mass-sensitive transducers. Part 2: Improving the sensors towards practical application

Oprea

2020

Anal Bioanal Chem

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“…In the simpler case of a cantilever respecting Euler-Bernoulli conditions and for small variations, dρ and dη of the mass density ρ and the viscosity η of the gas, it can be shown that the quality factor Q varies (Iglesias et al, 2019):…”

Section: Changing the Gasmentioning

confidence: 99%

“…For this reason, there is an increasing interest toward uncoated sensors, which rely on the change of the physical properties of their surrounding gas such as thermal conductivity (Daynes, 1933;Hale et al, 1992;Simon and Arndt, 2002), or mass density (Tétin et al, 2010;Boudjiet et al, 2014;Rosario and Mutharasan, 2014). Despite the lack of selectivity of uncoated sensors, it is still possible to discriminate from different gases by measuring multiple parameters at once (Iglesias et al, 2019).…”

Section: Introductionmentioning

confidence: 99%

“…This has been used previously for characterizing liquids (Heinisch et al, 2015) and even gases, despite the fact that their mass density and viscosity are much smaller. Gas detection such as hydrogen, carbon dioxide, argon, helium and methane detection have already been demonstrated using uncoated resonant sensors (Tétin et al, 2010;Boudjiet et al, 2014;Rosario and Mutharasan, 2014;Iglesias et al, 2019). These measurements have been performed either using silicon or piezoelectric cantilevers at frequencies below 200 kHz.…”

Section: Introductionmentioning

confidence: 99%

“…Measured values of S for V dc = 35V and reported values of dρ/ρ and dη/η according to previous work(Iglesias et al, 2019).…”

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confidence: 99%

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Proof of Concept and Preliminary Results of Gas Detection by Measuring the Admittance at the Resonance and Anti-resonance of an Uncoated CMUT

et al. 2020

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Functionalized films are commonly used in gas sensing to target a particular gas. This is due, in part, to their usually high capability to detect very low concentrations and their high selectivity. However, their poor stability over time remains a challenge when dealing with applications that require the sensing to remain reliable without frequent recalibration. For this reason, uncoated gas sensors have become increasingly popular regardless of their lower sensitivity and their often non-selective characteristics. There exist different approaches for gas sensing without a functionalized film. One possibility is to use an uncoated resonating sensor and tracking its resonant properties which depend on its surrounding environment. The easy integration capability of capacitive micromachined ultrasonic transducers (CMUTs) makes them great candidates for uncoated gas sensing. Moreover, they are able to reach very high resonant frequencies and, therefore, allow for a shorter response time. In this article, a method to detect gas by following the value of the admittance of an uncoated silicon nitride CMUT array at either the resonant or at the anti-resonant frequency is presented and tested. This chemical detection is purely based on the change of the physical properties of the gas mixture (the mass density and the viscosity). A general model describing the impact of the electrical and mechanical properties of the CMUT in the sensitivity is presented, validated and applied to carbon dioxide and methane detection.

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A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers

Liu,

Lin,

et al. 2024

Flow Measurement and Instrumentation

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Discrimination and concentration measurement of different binary gas mixtures with a simple resonator through viscosity and mass density measurements

Cited by 19 publications

References 22 publications

Gas sensors based on mass-sensitive transducers. Part 2: Improving the sensors towards practical application

Gas sensors based on mass-sensitive transducers. Part 2: Improving the sensors towards practical application

Proof of Concept and Preliminary Results of Gas Detection by Measuring the Admittance at the Resonance and Anti-resonance of an Uncoated CMUT

A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers

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