2022
DOI: 10.1038/s41524-022-00939-9
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Disentangling multiple scattering with deep learning: application to strain mapping from electron diffraction patterns

Abstract: A fast, robust pipeline for strain mapping of crystalline materials is important for many technological applications. Scanning electron nanodiffraction allows us to calculate strain maps with high accuracy and spatial resolutions, but this technique is limited when the electron beam undergoes multiple scattering. Deep-learning methods have the potential to invert these complex signals, but require a large number of training examples. We implement a Fourier space, complex-valued deep-neural network, FCU-Net, to… Show more

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Cited by 21 publications
(10 citation statements)
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“…The diffraction patterns from these geometries are challenging to classify, as they contain contributions from different crystal structures, crystal orientations, and materials. In this context, various machine learning methods have been employed to analyze materials at the atomic scale, including deep learning [ 24 ] and unsupervised clustering algorithms. [ 25 ] While unsupervised clustering algorithms can classify different deformations in nanomaterials based on similarities in their diffraction patterns, they might fall short in accurately isolating strain deformation in the crystal lattice, especially when strain and deformation intricacies are closely intertwined.…”
Section: Introductionmentioning
confidence: 99%
“…The diffraction patterns from these geometries are challenging to classify, as they contain contributions from different crystal structures, crystal orientations, and materials. In this context, various machine learning methods have been employed to analyze materials at the atomic scale, including deep learning [ 24 ] and unsupervised clustering algorithms. [ 25 ] While unsupervised clustering algorithms can classify different deformations in nanomaterials based on similarities in their diffraction patterns, they might fall short in accurately isolating strain deformation in the crystal lattice, especially when strain and deformation intricacies are closely intertwined.…”
Section: Introductionmentioning
confidence: 99%
“…Machine learning (ML) techniques have been widely applied in electron microscopy for applications such as atom localization [1][2][3] , defect identification [4][5][6] , image denoising [7][8][9] , determining crystal tilts and thickness [10][11][12] , classifying crystal structures 13,14 , optimizing convergence angles 15 , identifying Bragg disks 16 , visualizing material deformations 17 , automated microscope alignment 18 , and many others. Several recent reviews [19][20][21] provide an overview of new and emerging opportunities at the interface of electron microscopy and ML.…”
Section: Introductionmentioning
confidence: 99%
“…Machine learning (ML) techniques have been widely applied in electron microscopy for applications such as atom localization, 1-3 defect identification, [4][5][6] image denoising, [7][8][9] determining crystal tilts and thickness, [10][11][12] classifying crystal structures, 13,14 optimizing convergence angles, 15 identifying Bragg disks, 16 visualizing material deformations, 17 automated microscope alignment, 18 and many others. Several recent reviews [19][20][21] provide an overview of new and emerging opportunities at the interface of electron microscopy and ML.…”
Section: Introductionmentioning
confidence: 99%