The four phenyl groups of 1,1,3,3‐tetraphenyl‐2,2,4,4‐tetrakis(trimethylsilyl)cyclotetrasilane were partially replaced by chlorine atom(s) by successive treatment with trifluoromethanesulfonic acid and lithium chloride. The replacement of all phenyl groups was carried out with hydrogen chloride in the presence of aluminum chloride. The structural features of the resulting mono‐, di‐, and tetrachlorocyclotetrasilanes were compared by X‐ray crystallography.