2006
DOI: 10.1143/jjap.45.l1197
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Dislocation-Free m-Plane InGaN/GaN Light-Emitting Diodes on m-Plane GaN Single Crystals

Abstract: m-Plane ð101 10Þ nonpolar InGaN-based light emitting diodes (LEDs) with no threading dislocations or stacking faults have been realized on m-plane GaN single crystals by conventional metal organic vapor phase epitaxy. The crystalline properties of the material, together with the structures of the LED devices, have been observed by scanning transmission electron microscopy. It is shown that dislocation-free nonpolar nitride layers with smooth surfaces can be obtained under growth conditions involving high V/III… Show more

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Cited by 133 publications
(89 citation statements)
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“…1͒ have been grown on r-plane sapphire, 3 ͑100͒ ␥-LiAlO 2 , 1 a-and m-plane SiC, 4,5 and more recently on a-and m-plane GaN substrates. 6,7 Semipolar nitride films have been mostly grown by using lateral epitaxial overgrowth techniques 8 but also on m-plane sapphire, 9 Si͑001͒, 10 and semipolar GaN bulk substrates. 11,12 The structural characteristics of the nonpolar and semipolar nitride films are expected to be anisotropic as a result of the anisotropies of film and substrate surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…1͒ have been grown on r-plane sapphire, 3 ͑100͒ ␥-LiAlO 2 , 1 a-and m-plane SiC, 4,5 and more recently on a-and m-plane GaN substrates. 6,7 Semipolar nitride films have been mostly grown by using lateral epitaxial overgrowth techniques 8 but also on m-plane sapphire, 9 Si͑001͒, 10 and semipolar GaN bulk substrates. 11,12 The structural characteristics of the nonpolar and semipolar nitride films are expected to be anisotropic as a result of the anisotropies of film and substrate surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…5 Light-emitting diodes based on m-plane GaN with promising device performance have been reported as well. 6,7 However, all heteroepitaxial non-polar structures suffer from high stacking fault (SF) densities of up to 10 5-…”
mentioning
confidence: 99%
“…A few years later, an m-plane LED with higher EQE (EQE 3.1% at 20 mA for 1.79 mW and 435 nm), (16) an m-plane LED with higher output power (EQE 38.9% at 20 mA for 23.7 mW and 407 nm), (17) and a high-brightness semipolar LED (EQE 33.9% at 20 mA for 20.6 mW and 411 nm) (18) were reported. Based on the nonpolar/semipolar device technology, Professor Nakamura founded a venture company called Soraa with two other UCSB professors and they released high-performance LED light bulbs in 2012 (Fig.…”
Section: Challenges Toward Realizing Innovative Devices Using Gan Submentioning
confidence: 99%