The role of a simple surface defect, such as a step, for relaxing the stress applied to a semiconductor, has been investigated by means of large scale first principles calculations. Our results indicate that the step is the privileged site for initiating plasticity, with the formation and glide of 60• dislocations for both tensile and compressive deformations. We have also examined the effect of surface and step termination on the plastic mechanisms. The plasticity of semiconductors has been extensively studied for the last decades in both fundamental and applied research, leading to significant progresses in the understanding of the key mechanisms involved. Several issues remain unsolved, however, one of the most essential being the formation of dislocations in nanostructured semiconductors such as nano-grained materials, or nanolayers in heteroepitaxy, systems extensively used in devices. While in bulk materials the few native dislocations are able to multiply via Frank-Read type mechanisms to ensure plasticity, the situation is different in nanostructured materials where dimensions are too small to allow dislocation multiplication [1]. The presence of dislocations in these materials appears to be more controlled by nucleation than by multiplication processes. It has been proposed that surfaces and interfaces, which become prominent for small dimensions, play a major role. Several observations support this assumption, especially for strained layers and misfit dislocations at interfaces [2,3,4]. The formation at surfaces is also relevant where large stresses exist, like near a crack [5,6,7,8,9].Since in situ experimental observations of dislocation nucleation is not yet possible due to the very small dimensions and short observation timescales, the formation of dislocations at surfaces has been mainly investigated theoretically, particularly with continuum models and elasticity theory [10,11,12]. However, in these approaches, the predicted activation energy is very large, in disagreement with experiments. It has been proposed that surface defects, such as steps, help the formation by lowering the activation energy. This is supported by experimental facts in the context of dislocation nucleation at or near crack fronts, with dislocation sources located on the cleavage surface and coinciding with cleavage ledges [13,14,15,16]. In addition, it has been shown that, in a stressed solid, a surface step is a source of local stress concentration [17,18,19], although not as efficient as a crack tip. Therefore, a number of continuum models have been developed, taking into account the energy gain associated to the step elimination in the process of dislocation nucleation [20,21,22,23]. Atomistic calculations have also been performed for characterizing the energetics, the processes involved, and the role of surface defects [24,25,26,27,28,29,30].These studies led to a better knowledge of the dislocation formation from surface steps or cleavage ledges, but we are still far from a complete understanding of the phenomenon. Fu...