Displacement sensing based on microscopic vision with high resolution and large measuring range

Abstract

Microimage strain sensing (MISS) is a novel piston‐type sensor based on microscopic vision. In this study, optical disc slice is used as information carriers to improve MISS. There are multiple pits on the surface of an optical disc. By using machine vision algorithms, the pits can be converted into digital information, making them scales for recording displacements. By this means, we proposed a sensing method that combines high resolution, wide range, and strong robustness. The study measured displacement under different conditions. To address inevitable factors such as pixel drift, and manufacturing errors, corresponding compensation methods were provided. The results show that the measurements closely match those of the linear variable differential transformer, with a resolution of up to 20 nm and a range approaching the sensor size. Despite the sensor's dependence on machine vision, it demonstrates strong resistance to environmental factors such as brightness and angle. Combining compensation methods for pixel drift, and manufacturing errors, this sensor can be well‐applied in various working conditions.