2024
DOI: 10.1063/5.0203648
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Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV

V. Laffert,
F. S. Sajjadian,
R. Richter
et al.

Abstract: The dissociative photoionization of phenyl triflate (C6H5OSO2CF3), a neutral photoacid generator used in photolithography, was investigated in a gas phase experiment employing extreme ultraviolet (EUV) synchrotron radiation at 92 eV and photoelectron–photoion coincidence detection. The interaction of EUV photons with the molecule leads almost exclusively to dissociation, which is dominated by a sequential fragmentation mechanism, in which SO2, CF3, CO, and C2H2 are lost. For lithographic purposes, the lack of … Show more

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