1985
DOI: 10.1117/12.947809
|View full text |Cite
|
Sign up to set email alerts
|

Dissolution Rates Of Thin Polymer Films Using Laser Interferometry

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

1
14
0

Year Published

1987
1987
2010
2010

Publication Types

Select...
5
1
1

Relationship

0
7

Authors

Journals

citations
Cited by 16 publications
(15 citation statements)
references
References 0 publications
1
14
0
Order By: Relevance
“…Polymer dissolution has been investigated using several experimental techniques including gravimetry, laser interferometry,19–22 differential refractometry,23 optical microscopy,24 ellipsometry,25 spin echo NMR,26 magnetic resonance imaging (MRI),27 and Fourier‐transform infrared (FTIR) microscopy 28–34. FTIR microscopy can provide simultaneous insights into both spatial and spectral data (i.e., chemical components) as a function of time, making the dissolution experiment effective and easy to conduct.…”
Section: Introductionmentioning
confidence: 99%
“…Polymer dissolution has been investigated using several experimental techniques including gravimetry, laser interferometry,19–22 differential refractometry,23 optical microscopy,24 ellipsometry,25 spin echo NMR,26 magnetic resonance imaging (MRI),27 and Fourier‐transform infrared (FTIR) microscopy 28–34. FTIR microscopy can provide simultaneous insights into both spatial and spectral data (i.e., chemical components) as a function of time, making the dissolution experiment effective and easy to conduct.…”
Section: Introductionmentioning
confidence: 99%
“…Experimentally, many techniques and sample geometries have been used. 8 Optical microscopyg> lo has proven useful for the study of swelling and dissolution behavior since it allows measurement of the rate of dissolution and observation of the concentration profile in the dissolving surface layer. However, microscopy works best when the dimensions being observed are 10 pm or greater.…”
Section: Introductionmentioning
confidence: 99%
“…The development of a polymeric resist by dissolution may be described as a two-step process (1). First, the smaller solvent molecules must diffuse into the polymer matrix.…”
mentioning
confidence: 99%