Distributed MEMS transmission lines for tunable filter applications

Liu, Yu; Borgioli, A.; Nagra, A.S.; York, R.A.

doi:10.1002/mmce.1034

Cited by 72 publications

(33 citation statements)

References 4 publications

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“…The insertion loss is less than 3 dB, the return loss is more than 10 dB in the passband. [5,6], and the other is a microelectromechanical system (MEMS) bridge [7,8]. The tunable BPFs using the MEMS technique have an advantage in terms of loss.…”

Section: Introductionmentioning

confidence: 99%

Tunable Bandpass Filter with Varactors Based on the CRLH-TL Metamaterial Structure

Kim¹,

Lee²

2013

Journal of electromagnetic engineering and science

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This paper presents a tunable bandpass filter based on the varactor-loaded composite right-and left-handed transmission line (CRLH-TL). The proposed filter is composed of one CRLH-TL unit cell, which corresponds to the third-order bandpass filter. The tunable bandpass filter is designed using only lumped-elements. The use of lumped elements saves space and lowers the fabrication cost. The size of the proposed tunable bandpass filter is 17 mm × 5 mm, neglecting the feed lines and DC lines. All of the varactors are controlled by one DC bias. The center frequency of the bandpass filter can be controlled by varying the value of the varactors. The tunable range of the center frequency is from 412.5 to 670 MHz. The insertion loss is less than 3 dB, the return loss is more than 10 dB in the passband. [5,6], and the other is a microelectromechanical system (MEMS) bridge [7,8]. The tunable BPFs using the MEMS technique have an advantage in terms of loss. However, a very high DC bias voltage must be applied to control the bridge height, and MEMS-based BPFs are slow. Often, it is expensive to fabricate the MEMS. Therefore, MEMS-based BPFs are not ideal for commercial wireless applications. In contrast, tunable BPFs with varactors show faster tuning speeds and lower voltage operation. However, because of the low Q varactors, insertion loss inside the passband can be larger in tunable BPFs with the varactor. In controlling the center frequency of the conventional tunable BPFs, the series and parallel resonant frequencies must be controlled simultaneously. Thus, the BPFs should have two DC biases. In [9], the center frequency of the BPF can be tuned from about 0.45

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Section: Introductionmentioning

confidence: 99%

Tunable Bandpass Filter with Varactors Based on the CRLH-TL Metamaterial Structure

Kim¹,

Lee²

2013

Journal of electromagnetic engineering and science

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“…In standard filter design at low frequency, the MEMS varactor is used as a lumped element with off-chip inductors. At high frequency, some designs were reported with integrated transmission lines and MEMS capacitors [5,6]. The transmission lines used for these designs are half wavelength or 180 • , so the filter will be very long at low frequencies.…”

Section: Introductionmentioning

confidence: 99%

Tunable Band-Pass Filter Using Rf Mems Capacitance and Transmission Line

Saha

Hanke²,

Sagberg³

et al. 2011

PIER C

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Abstract-In this paper we present the design and fabrication of an RF MEMS tunable band-pass filter. The band-pass filter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the flexibility of tuning both the centre frequency and the band-width of the band-pass filter. A prototype of the tunable band-pass filter is realized using parallel plate capacitances. The variable shunt and series capacitances are formed by a combination of parallel plate RF MEMS shunt bridges and series cantilevers. The filter operates at C-X band. The measurement results agree well with the simulation results.

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“…Over the past decade, radio frequency micro-electro-mechanical systems (RF MEMS) introduced an alternative way in building tunable filters for multi-band receivers. For example, MEMS varactors have been employed by (Liu et al 2001) in order to realize a transmission line with voltage-variable electrical length. Tunable filters with 3.8% tuning range at 20 GHz and a minimum insertion loss of 3.6 dB were demonstrated.…”

Section: Introductionmentioning

confidence: 99%

Micromachined W-band polymeric tunable iris filter

Sammoura

Lin

2011

Microsyst Technol

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A tunable filter working in the W-band spectrum has been successfully demonstrated using a combined plastic molding and electroplating process. The prototype filter architecture has two deformable membranes of 1.6 mm in diameter on top of a WR-10 waveguide based, two-cavity, polymeric iris filter. The membranes can be actively adjusted to deform and alter the cavity geometry concurrently for frequency tuning applications. The tunable filter was simulated using High Frequency Structure Simulator and theoretically analyzed using the perturbation method. Experimentally, a prototype band-pass filter has bandwidth of 4.05 GHz centered at 94.79 GHz and a minimum insertion loss of 2.37 dB with return loss better than 15 dB. As a tunable filter, a total of 2.59 GHz center frequency change has been recorded when the membranes deflected from 50 lm into, to 150 lm out of the waveguide. These results imply that the demonstrated tunable filter could be potentially applicable for waveguide-based mm-wave systems.

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Distributed MEMS transmission lines for tunable filter applications

Cited by 72 publications

References 4 publications

Tunable Bandpass Filter with Varactors Based on the CRLH-TL Metamaterial Structure

Tunable Bandpass Filter with Varactors Based on the CRLH-TL Metamaterial Structure

Tunable Band-Pass Filter Using Rf Mems Capacitance and Transmission Line

Micromachined W-band polymeric tunable iris filter

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