2022
DOI: 10.1155/2022/4880505
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Disturbance Observer-Based Sliding Mode Control for MEMS with Prescribed Performance

Abstract: In this study, we study the performance guaranteed tracking problem for the uncertain MEMS gyroscope dynamics. A fixed-time nonlinear function and the transformed error are introduced to establish the preset time control property for the closed-loop system. Then, a funnel sliding mode controller is presented to stabilize the system. To compensate for the uncertainty and external disturbance, a novel lumped disturbance observer is proposed. Different from most existing compensation control results for the MEMS … Show more

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