1999 Fifth European Conference on Radiation and Its Effects on Components and Systems. RADECS 99 (Cat. No.99TH8471)
DOI: 10.1109/radecs.1999.858636
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DLTS and capacitance transients study of defects induced by neutron irradiation in MOS structures CCD process

Abstract: The aim of this paper is to study neutron irradiation effects on PMOS capacitors and NMOSFETs transistors.The characterization of induced defects was made by capacitance transients C(t) measurements, DLTS spectroscopy, and optical DLTS (ODLTS). DLTS spectra present three peaks (1, 2, and 3) due to deep levels created in the semiconductor and two peaks (4 and 5) due to minority carrier generation. Levels 1 and 2 are reported in the literature and it was suggested that the level 2 may be due to the Two other min… Show more

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“…The negative V th shift is proportional to the net charge accumulation caused by radiation in the oxide layer, which is the main reason for the negative V th shift in the MOSFET. When exposed to neutron irradiation, different types of defects are produced in the oxide layer, increasing the defect density in the device [23,24]. These radiation-induced defects may capture the holes induced by gammaray irradiation and further increase the number of trap charges in the oxide layer.…”
Section: Discussionmentioning
confidence: 99%
“…The negative V th shift is proportional to the net charge accumulation caused by radiation in the oxide layer, which is the main reason for the negative V th shift in the MOSFET. When exposed to neutron irradiation, different types of defects are produced in the oxide layer, increasing the defect density in the device [23,24]. These radiation-induced defects may capture the holes induced by gammaray irradiation and further increase the number of trap charges in the oxide layer.…”
Section: Discussionmentioning
confidence: 99%