DNA origami imaging with 10.9 MHz AFM MEMS probes

Walter, Benjamin; Mairiaux, Estelle; Xiong, Zhuang; Faucher, M.; Buchaillot, L.; Legrand, Bernard

doi:10.1109/memsys.2012.6170236

Cited by 6 publications

(8 citation statements)

References 8 publications

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“…In the light of the application of MEMS resonators in the field of surface imaging, a new concept of AFM probes exploiting the elliptic mode vibration of a ring shaped resonator with integrated capacitive excitation and detection was proposed by the authors in 2007 [ 14 ]. Further research work showed that such AFM probes were capable of surface imaging with a force resolution of several pN/√Hz [ 15 – 17 ]. The resonance frequency of these ring probes reached up to 11 MHz with a quality factor of 1500 in air and the capability of biomolecular imaging was successfully demonstrated [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

“…Further research work showed that such AFM probes were capable of surface imaging with a force resolution of several pN/√Hz [ 15 – 17 ]. The resonance frequency of these ring probes reached up to 11 MHz with a quality factor of 1500 in air and the capability of biomolecular imaging was successfully demonstrated [ 17 ]. Another advantage of these probes concerns the in-plane nanotip that features an apex less than 10 nm [ 18 ], enabling the batch fabricationof ready-to-use AFM probes.…”

Section: Introductionmentioning

confidence: 99%

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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Xiong

Mairiaux

Walter

et al. 2014

Sensors

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In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5 μm in thickness was enabled to feature MHz resonance frequencies with integrated thermal actuation and piezoresistive detection. Standard silicon micromachining was employed. Both electrical and optical measurements were carried out in air. The resonance frequency and the quality factor of the novel probe were measured to be 5.4 MHz and 4000 respectively, which are much higher than those (about several hundreds of kHz) of commonly used cantilever probes. The probe was mounted onto a commercial AFM set-up through a dedicated probe-holder and circuit board. Topographic images of patterned resist samples were obtained. It is expected that the resonance frequency and the measurement bandwidth of such probes will be further increased by a proper downscaling, thus leading to a significant increase in the scanning speed capability of AFM instruments.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Xiong

Mairiaux

Walter

et al. 2014

Sensors

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“…The static value of the transducer capacitance C out neglecting fringe effects is calculated to be 18 fF, considering a transducer air gap d = 70 nm measured from scanning electron microscopy images. Design, fabrication and application as force sensor of such a DUT have been presented in [3]. A tip is located at a maximum of vibration to act as a force probe for future applications as atomic force microscopy sensor.…”

Section: Measurement Set-upmentioning

confidence: 99%

“…Applications encompass signal processing (filters, time references), inertial sensing (gyroscopes, accelerometers), mass sensing (label-free bio-chemical detection) [1] and force sensing (AFM probes) [3,4].…”

Section: Introductionmentioning

confidence: 99%

Microwave reflectometry: A high-resolution technique for measuring vibration of capacitive microresonators

Legrand

Ducatteau

Théron

et al. 2013

2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

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The paper proposes a novel technique for measuring the vibration of capacitive micro-electromechanical resonators. Based on microwave reflectometry in the gigahertz range, the technique offers signal-to-noise ratio greater than 100 dB for the studied device and it rejects any parasitic crosstalk due to stray capacitances. Experiments demonstrate that amplitude resolution better than 10 fm/√Hz is achieved, which competes with standard optical interferometry. The technique is particularly appropriate for electrical characterization of MEMS devices but also for signal processing of resonant sensors when large-bandwidth, high signal-to-noise ratio and fully electrical detection is required.

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“…With an outer/inner radius of 30/20 μm, these ring probes work in air at 11 MHz with a quality factor of 1500. The nano-tip apex radius is less than 10 nm and the capabilities of biological sample imaging are also demonstrated [10].…”

Section: Introductionmentioning

confidence: 99%

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

Xiong¹,

Walter²,

Mairiaux³

et al. 2013

J. Micromech. Microeng.

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A new concept of atomic force microscope (AFM) oscillating probes using electrostatic excitation and piezoresistive detection is presented. The probe is characterized by electrical methods in vacuum and by mechanical methods in air. A frequency-mixing measurement technique is developed to reduce the parasitic signal floor. The probe resonance frequencies are in the 1 MHz range and the quality factor is measured about 53 000 in vacuum and 3000 in air. The ring probe is mounted onto a commercial AFM set-up and topographic images of patterned sample surfaces are obtained. The force resolution deduced from the measurements is about 10 pN Hz−0.5.

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DNA origami imaging with 10.9 MHz AFM MEMS probes

Cited by 6 publications

References 8 publications

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Microwave reflectometry: A high-resolution technique for measuring vibration of capacitive microresonators

MEMS piezoresistive ring resonator for AFM imaging with pico-Newton force resolution

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