Impact of hot carrier induced interface damage and its spatial location on RF noise in deep submicrometer NMOSFETs is studied. A significant increase in minimum noise figure NF min and noise resistance R n after hot carrier stress, which cannot be explained alone by the change of the carrier density in the inversion layer, was observed. It was demonstrated that the presence of interface states at source side shows much greater impact on the degradation of NF min and R n . This provides strong experimental evidence that the local noise at source side plays a more important role in determining the channel noise.Index Terms -MOSFETs, semiconductor device noise, hot carrier, channel noise.