Domain formation in the deposition of thin films of two-component mixtures

To, Tung B.T.; Reis, F. D. A. Aarão

doi:10.1016/j.jallcom.2020.155093

Cited by 13 publications

(11 citation statements)

References 49 publications

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“…There have been several recent works dealing with the simulation of the growth of nanostructured thin films [35][36][37][38][39][40][41][42][43]. The influence of deposition rate and substrate temperature on the phase structure of the Cu-Mo films was examined using the approaches based on the phase-field models by Derby et al [35] and Ankit et al [36].…”

Section: Introductionmentioning

confidence: 99%

“…The influence of deposition rate and substrate temperature on the phase structure of the Cu-Mo films was examined using the approaches based on the phase-field models by Derby et al [35] and Ankit et al [36]. By using the kinetic Monte Carlo approaches, the effects of substrate tilt angle [37], substrate temperature [38], deposition rate [13,14], and composition [39] on the phase structure of nanocomposites have been recently investigated. Bouaouina et al in [37] discovered that the surface roughness and the phase structure of TiN thin films are influenced by the change of substrate tilt angle: an increase in the substrate tilt angle caused an increase in the tilt angle of TiN columns and the surface roughness as well.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of Morphology of Aluminum Co-Doped Scandium Stabilized Zirconia (ScAlSZ) Thin Films

et al. 2021

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The morphology of aluminum co-doped scandium stabilized zirconia (ScAlSZ) thin films formed by e-beam deposition system was investigated experimentally and theoretically. The dependencies of surface roughness, and the films’ structure on deposition temperature and deposition rate were analyzed. It was shown experimentally that the dependence of the surface roughness on deposition temperature and deposition rate was not monotonic. Those dependencies were analyzed by mathematical modeling. The mathematical model includes the processes of phase separation, adsorption and diffusion process due to the film surface curvature. The impacts of substrate temperature, growth rate on surface roughness of thin films and lateral nanoparticle sizes are shown by the modeling results. Modeling showed that the roughness of the surface of grown films became higher in most cases as the substrate’s temperature rose, but the higher deposition rate resulted in lower surface roughness in most cases. The results obtained by simulations were compared to the relevant experimental data. The non-linear relationships between surface roughness of grown films and lateral size of nanoparticles were also shown by our modeling results, which suggested that the variation in the surface roughness depending on the substrate temperature and growth rate was related to the lateral size of nanoparticles.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Investigation of Morphology of Aluminum Co-Doped Scandium Stabilized Zirconia (ScAlSZ) Thin Films

et al. 2021

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“…There have been several recent efforts to simulate the growth of nanostructured thin films based on kinetic Monte Carlo [13][14][15], molecular dynamics [16], and phase-field [17][18][19][20] approaches. The influences of substrate temperature [13], deposition rate [13,15], substrate tilt angle [14], and composition ratios [15] on the structure of nanocomposites have been recently determined by using the kinetic Monte Carlo approaches. It was discovered in [14] by Bouaouina et al that an increase in the substrate tilt angle resulted in an increase in the surface roughness and the tilt angle of TiN columns.…”

Section: Introductionmentioning

confidence: 99%

Modelling of Phase Structure and Surface Morphology Evolution during Compound Thin Film Deposition

Kairaitis

Galdikas

2020

Coatings

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The dependences of the surface roughness and the phase structure of compound thin films on substrate temperature and flux of incoming particles are investigated by a proposed mathematical model. The model, which describes physically deposited thin compound film growth process is based on the Cahn–Hilliard equation and includes processes of phase separation, adsorption, and diffusion. In order to analyze large temperature range and assuming deposition of energetic particles, the diffusion is discriminated into thermal diffusion, radiation-enhanced diffusion, and ion beam mixing. The model is adapted to analyze surface roughness evolution during film growth. The influences of the substrate temperature and incoming flux particles on the surface roughness are determined by a series of numerical experiments. The modelling results showed that the surface roughness increased as the substrate temperature rose. Besides, a similar relationship was discovered between substrate temperature and size of nanoparticles formed in binary films, so the increase in the surface roughness with the substrate temperature was attributed to the increase in size of nanoparticles.

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“…Table 2 shows the simulated parameter sets that are presented in this work, labeled from A to P. Simulations with other parameter sets were also performed, which support the conclusions stated here. The ratio R A ranges between 10 3 and 10 6 , which is typical of epitaxial growth in broad temperature ranges [5,43]. The ratio R S is 10 2 -10 3 times larger than R A , which corresponds to a facilitated diffusion in the substrate.…”

Section: Simulation Detailsmentioning

confidence: 97%

Roughness and Correlations in the Transition from Island to Film Growth: Simulations and Application to CdTe Deposition

To,

Almeida,

Ferreira

et al. 2021

Preprint

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Using kinetic Monte Carlo simulations, we develop a framework to relate morphological properties and microscopic dynamics during island growth, coalescence, and initial formation of continuous heteroepitaxial films. The average island width is controlled by adatom mobility on the substrate. Subsequent evolution strongly depends on the Ehrlich-Schwöebel energy barrier E ES of the deposited material. As E ES decreases, islands becomes taller and their coalescence is delayed. For small islands and large E ES , the global roughness increases as W ∼ thickness 1/2 and the local roughness increases

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Domain formation in the deposition of thin films of two-component mixtures

Cited by 13 publications

References 49 publications

Investigation of Morphology of Aluminum Co-Doped Scandium Stabilized Zirconia (ScAlSZ) Thin Films

Investigation of Morphology of Aluminum Co-Doped Scandium Stabilized Zirconia (ScAlSZ) Thin Films

Modelling of Phase Structure and Surface Morphology Evolution during Compound Thin Film Deposition

Roughness and Correlations in the Transition from Island to Film Growth: Simulations and Application to CdTe Deposition

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