Donor deactivation at high doping limit: Donor pair and impurity band model

Ahn, Chi‐Hyung; Choi, Woosung; Schmidt, Alexander; Lee, Keunho; Park, Young-Kwan; Kubotera, Hiroyuki; Kayama, Yasuyuki; Cowern, N.E.B.

doi:10.1109/sispad.2013.6650568

2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2013

DOI: 10.1109/sispad.2013.6650568

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Donor deactivation at high doping limit: Donor pair and impurity band model

Chi‐Hyung Ahn

Woosung Choi

Alexander Schmidt

et al.

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Donor deactivation at high doping limit: Donor pair and impurity band model

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