SOT deterministic switching of perpendicular magnetization requires an external in-plane magnetic field to break the mirror symmetry in the current-magnetization plane. This extra magnetic field is not favored for the scalability and integration of the devices. Various efforts have been made to break the mirror symmetry by extra design of the device structures, such as a wedge shape of ferromagnetic layer, [4] titled anisotropy, [5,6] additional magnetic layer with in-plane shape anisotropy, [7,8] exchange bias by adding antiferromagnetic layer, [9,10] and spin current gradient along the current direction. [11,12] The chiral symmetry breaking by a gradient of magnetic anisotropy or saturation magnetization can also induce field-free switching. [13,14] In order to increase the switching efficiency it is common to search for the spin source layer with a high spin Hall angle to increase the anti-dampinglike torque-induced longitudinal effective field. It still remains elusive for the increase of the effective out-of-plane (OOP) field in those structures since the breaking mirror symmetry is only a qualitative prerequisite. Recent works reported that the fieldfree switching can be realized by utilizing the intrinsic properties of the material such as the crystal symmetry in WTe 2 /FM Spin-orbit torque (SOT)-induced switching of perpendicular magnetization in the absence of magnetic field is crucial for the application of SOT-based spintronic devices. Recent works have demonstrated that the low-symmetry crystal structure in CuPt/CoPt can give rise to an out-of-plane (OOP) spin torque and lead to deterministic magnetization switching without an external field. However, it is essential to improve OOP effective field for the efficient switching. In this work, the impact of interface oxidation on the generation of OOP effective field in a CuPt/ferromagnet heterostructure is systematically studied. By introducing an oxidized CuPt surface, it is found that the field-free switching performance shows remarkable improvement. OOP effective field measurement indicates that the oxidation treatment can enhance the OOP effective field by more than two times. It is also demonstrated that this oxidation-induced OOP SOT efficiency enhancement is independent of the device shapes, magnetic materials, or magnetization easy axis. This work contributes to improve the performance of SOT devices and provides an effective fabrication guidance for future spintronic devices that utilize OOP SOT.