Doping Density Depth Profiling Analysis with High Resolution Elastic Recoil Detection

Abstract

The quantitative analysis of light elements in ultra thin films thinner than 10 nm is still a nontrivial task. This paper summarizes the prospects of high-resolution Elastic Recoil Detection (ERD) using a Q3D magnetic spectrograph. It is shown that sub-nanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has the best quantification possibilities compared to any other method. Sensitivity is sufficient to analyze main elements and impurities as e.g. necessary for the characterization of microelectronic materials. In addition, high-resolution channeling ERD can be performed in order to obtain information on lattice location of light elements in crystalline ultra thin layers. The potential of high-resolution ERD is demonstrated by several applications where it is the most valuable tool for elemental profiling.