2010
DOI: 10.1016/j.ultramic.2010.07.007
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Double aberration correction in a low-energy electron microscope

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Cited by 81 publications
(66 citation statements)
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References 36 publications
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“…In the present approach, i.e. using a multimethod spectro-microscope, such as the SMART, [6][7][8]42,43 we could limit this risk since a combination of methods could be applied quasi simultaneously to the same sample, even to the same spot on the sample, in a single instrument. The methods used in the present work, i.e.…”
Section: Multi-methods Approach For Comprehensive Characterizationmentioning
confidence: 99%
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“…In the present approach, i.e. using a multimethod spectro-microscope, such as the SMART, [6][7][8]42,43 we could limit this risk since a combination of methods could be applied quasi simultaneously to the same sample, even to the same spot on the sample, in a single instrument. The methods used in the present work, i.e.…”
Section: Multi-methods Approach For Comprehensive Characterizationmentioning
confidence: 99%
“…Experimentally demonstrated is a (conservatively measured) lateral resolution of 2.6 nm in LEEM and 18 nm in energy-filtered XPEEM, 42,43 respectively, and an increase in transmission by a factor of 6. 43 The instrument is installed at a soft X-ray, high flux-density undulator beam line at BESSY II with tunable photon energy range between 100 and 1000 eV and high photon energy resolution (o0.1 eV).…”
Section: Instrumental Set-upmentioning
confidence: 97%
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“…The main components of a LEEM instrument, as shown in the scheme in Fig. 2, are comparable to those in a PEEM instrument, with the exception of a beam splitting device (BS) with the attached electron gun and an optional electrostatic mirror unit (MO) that enables the correction of spherical and chromatic aberrations and therefore improves the lateral resolution and transmission [19,20]. In contrast to PEEM, which is a chemical sensitive technique, especially when using X-rays for excitation, LEEM is mainly a structural sensitive method.…”
Section: Photoemission Electron Microscopy (Peem) and Low Energy Elecmentioning
confidence: 99%
“…The degree of beam damage depends obviously on the chemical nature of the oxide, but is certainly an important issue that needs to be taken into account when performing in situ and in operando experiments, where the presence of gases (reactants) can trigger sample degradation, or when long acquisition times are required. In this regard, the successful correction of both, chromatic and spherical aberrations, in modern LEEM instruments have allowed the use of less demanding conditions to obtain images in terms of electron dosing on the samples and faster acquisition time [19,63,64]. The advantage of double aberration correction can be reflected on two different aspects.…”
Section: Future Perspectivesmentioning
confidence: 99%