Double-chip condenser microphone for rigid backplate using DRIE and wafer bonding technology

Kwon, Hyu‐Sang; Lee, Kwang-Cheol

doi:10.1016/j.sna.2007.04.068

Cited by 26 publications

(11 citation statements)

References 18 publications

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“…Conventional speech and acoustic transducers, such as condenser microphones, detect speech signals by perceiving the motion of air particles when sound is spread via an air medium [ 1 ]. Another technique that has been thoroughly explored is speech detection via perceptions of sound pressure [ 2 , 3 ]. Li Zong Wen’s group reported using the Doppler radar with grating structures to detect speech signals [ 4 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Radar Sensor for the Non-Contact Detection of Speech Signals

Jiao

Lü

Jing

et al. 2010

Sensors

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Different speech detection sensors have been developed over the years but they are limited by the loss of high frequency speech energy, and have restricted non-contact detection due to the lack of penetrability. This paper proposes a novel millimeter microwave radar sensor to detect speech signals. The utilization of a high operating frequency and a superheterodyne receiver contributes to the high sensitivity of the radar sensor for small sound vibrations. In addition, the penetrability of microwaves allows the novel sensor to detect speech signals through nonmetal barriers. Results show that the novel sensor can detect high frequency speech energies and that the speech quality is comparable to traditional microphone speech. Moreover, the novel sensor can detect speech signals through a nonmetal material of a certain thickness between the sensor and the subject. Thus, the novel speech sensor expands traditional speech detection techniques and provides an exciting alternative for broader application prospects.

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Section: Introductionmentioning

confidence: 99%

A Novel Radar Sensor for the Non-Contact Detection of Speech Signals

Jiao

Lü

Jing

et al. 2010

Sensors

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“…Most of the capacitive microphones consist of a movable diaphragm and a perforated fixed electrode [4][5][6] , called the back-plate, separated by an air gap (see Fig.1). An incoming sound wave excites oscillations of the suspended diaphragm, which is electrically detected as capacitance change between diaphragm and back-plate.…”

Section: A Design the Microphone Structurementioning

confidence: 99%

Simulation and optimization of a micro-machined silicon condenser microphone using a perforated diaphragm

Zhang

Fang

2014

2014 9th IEEE Conference on Industrial Electronics and Applications

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A method was proposed to analyze silicon condenser microphone using a perforated diaphragm. Different from the microphone with back-holes, the acoustic holes are made on the diaphragm, which avoids making the holes on the back plate and etching the back chamber. For the microphone with this structure, a new analysis method was proposed, which combines the microphone equivalent circuit and finite element analysis, establish a more accurate microphone equivalent circuit. On this basis, we studied the effects of diaphragm area, microphone acoustic hole and air gap on the microphone performance, which can provide the theoretical guidance for the design of microphone. Finally, the steepest descent is used to optimize the structure of the microphone. The sensitivity of the optimized structure is -41.6dB with the pull-in voltage is 12V, and the frequency response in 20Hz-20.6kHz is flat.

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“…MEMS-based capacitive microphones are used where low power, low noise level, large band width and high sensitivity are the crucial requirements. In the case of MEMS capacitive microphones a diaphragm movement toward a ground plate is caused by the applied acoustic pressure on the diaphragm leading to a changing capacitance (Kwon et al, 2007). The sensing capacitance is calculated by integration of the diaphragm deflection in respect to the fixed ground-plate (Chen et al, 2008).…”

Section: Introductionmentioning

confidence: 99%

An Accurate Study on Capacitive Microphone with Circular Diaphragm Using a Higher Order Elasticity Theory

Dowlati

Rezazadeh

Afrang

et al. 2016

Lat. Am. j. solids struct.

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This study has been undertaken to investigate the mechanical behavior of the capacitive microphone with clamped circular diaphragm using modified couple stress theory in comparison to the classical one. Presence of the length scale parameter in modified couple stress theory provides the means to evaluate the size effect on the microphone mechanical behavior. Investigating Pull-in phenomenon and dynamic behavior of the microphone are the matters provided due to the application of a step DC voltage. Also the effects of different air damping coefficients on dynamic pull-in voltage and pull-in time have been studied. The output level or sensitivity of the microphone has been studied by investigating the frequency response in term of magnitude for different length scale parameters to figure out how the length scale parameter affects on the sensitivity of the capacitive microphone. To achieve these ends, the nonlinear differential equation of the circular diaphragm has been extracted using Kirchhoff thin plate theory. Then, a Step-by-Step Linearization Method (SSLM) has been used to escape from the nonlinearity of the differential equation. Afterwards, Galerkin-based reduced-order model has been applied to solve the obtained equation.

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Double-chip condenser microphone for rigid backplate using DRIE and wafer bonding technology

Cited by 26 publications

References 18 publications

A Novel Radar Sensor for the Non-Contact Detection of Speech Signals

A Novel Radar Sensor for the Non-Contact Detection of Speech Signals

Simulation and optimization of a micro-machined silicon condenser microphone using a perforated diaphragm

An Accurate Study on Capacitive Microphone with Circular Diaphragm Using a Higher Order Elasticity Theory

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