Double Patterning Using Multilayer Hard Mask Process with Perhydropolysilazane

Abstract

We investigate the influence of short-range and long-range disorder on the exponential tails in absorption and electro-absorption. The numerical calculations are performed for a two-band one-dimensional Anderson Hamiltonian with diagonal disorder. The long-range disorder is described by a Gaussian distribution function. It is correlated, i.e. the disorder potentials are the same for valence and conduction bands. The distribution function for the short-range disorder is rectangular and uncorrelated. We find that exponential absorption tails are due to correlated long-range disorder. Similarly, a significant change in the absorption spectrum in the presence of an external electric field is only found in the presence of such correlated long-range disorder. In this case, we obtain a quadratic dependence of the electro-absorption signal on the external field, and in comparison with the absorption tail we find a somewhat smaller slope for the electro-absorption.