We
developed a novel process for fabricating oxygen-rich Zn(O,S)
buffer layers by magnetron reactive sputtering with a single oxygen-rich
Zn(O,S) target, suitable for industrial all-dry production. Then,
we successfully fabricated Cd-free Cu(In,Ga)(S,Se)2 (CIGSSe)
solar cells. By varying the oxygen partial pressure during sputtering
from 0 to 20%, we precisely controlled the Zn(O,S) composition, then
systematically investigated its effects on the quality of oxygen-rich
Zn(O,S) films, the properties of formed p–n junctions, and
the performance of CIGSSe solar cells with Zn(O,S) buffer. We demonstrated
that reactive sputtering with a Zn(O,S) target can generate a homogeneous,
high-quality oxygen-rich Zn(O,S) buffer on large-area substrates.
We observed a unique and unusual phenomenon: the appropriate content
of secondary phase ZnSO4 and ZnSO3 improved
the band alignment for oxygen-rich Zn(O,S). Combining our proposed
schematic diagram of band alignmentat the Zn(O,S)/CIGSSe interface,
we established a crucial correlation between the device performance
and the interfacial properties at the p–n junction. For the
CIGSSe device performance, the band alignment matching at the heterojunction
plays a primary role, and the quality of oxygen-rich Zn(O,S) films
plays a secondary role. Consequently, an excellent oxygen-rich Zn(O,S)
buffer can be obtained with 10% Zn(O,S) deposition oxygen partial
pressure , and the optimized device shows a higher V
oc (447 mV) and a similar conversion efficiency (11.2%)
than conventional CIGSSe devices with CdS buffer.