Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures

Wafer-scale fabrication of nanoapertures using corner lithography

“…An aperture of 44 nm × 55 nm inside an oxide frame (bird's eye and side views) after corner lithography in a pyramidal etch pit. The aperture is not a perfect square but has a hyperbolic rectangular shape [58]. The lips along the sides are a consequence of the corner lithography, as found in figure 5.…”

“…In the oldest technique, the aperture is formed at the tip-end of a previously fabricated sharp tip [55][56][57][58]. The 'inverse' technique forms the aperture inside the sharp concave corner of a previously fabricated etch pit, also with a tiny radius [59,60].…”

Standards for the Calibration of Instruments for Dimensional Nanometrology

“…In a joint project of PTB, Institut fçr Physikalische Hochtechnologie Jena (IPHT) and Nanosensors (now Nanoworld), line structures with very sharp tran-248 18 Standards for the Calibration of Instruments for Dimensional Nanometrology sitions were manufactured for the preparation of special samples [9]. Figure 18.3 shows such a structure and Figure 18.4 the profiles recorded on it.…”

3D Nanofabrication of fluidic components by corner lithography

“…The precision uncertainty of the smallest b- Figure 2.11: Aperture of 44nm × 55nm inside an oxide frame (bird's eye and side views) after corner lithography in a pyramidal etch pit. The aperture is not a perfect square but has a hyperbolic rectangular shape (Hübner et al, 2003). The lips along the sides are a consequence of the corner lithography as found in Figure 2.5.…”

“…In the oldest technique, the aperture is formed at the tip-end of a previously fabricated sharp tip (Marcus et al, 1990;Jansen et al, 1995;Sheng et al, 1999;Hübner et al, 2003). The "inverse" technique forms the aperture inside the sharp concave corner of a previously fabricated etch pit, also with a tiny radius (Georgiev et al, 2003;Choi et al, 2003).…”