Drie of fused silica

Cao, Zhong; VanDerElzen, B.; Owen, K. J.; Yan, Jie; He, Guangke; Peterson, Robert A.; Grimard, Dennis S.; Najafi, K.

doi:10.1109/memsys.2013.6474253

Cited by 18 publications

(10 citation statements)

References 6 publications

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“…We used a fused silica wafer, which is pure silicon dioxide for two reasons: 1) The impurities in glass may interfere with the DRIE process, so it is difficult to achieve a high aspect-ratio deep etching on a glass wafer, and 2) as the fused silica is pure silicon dioxide, it has the same ideal optical and biocompatibility characteristics as glass. 30 …”

Section: Resultsmentioning

confidence: 99%

Paired single cell co-culture microenvironments isolated by two-phase flow with continuous nutrient renewal

et al. 2014

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Cancer-stromal cell interaction is a critical process in tumorigenesis. Conventional dish-based assays, which simply mix two cell types, are limited in three aspects: 1) Limited control of cell microenvironment; 2) Inability of studying cell behavior in a single-cell manner, and; 3) Difficulties in characterizing single cell behavior within a highly heterogeneous cell population (e.g. tumor). An innovative use of microfluidic technology is centered on improving the spatial resolution for single cell assays. However, it is challenging to isolate the paired interacting cells, while maintaining nutrient renewal. In this work, two-phase flow was used as the simple isolation method, separating the microenvironments of each individual chamber. As nutrients in an isolated chamber are consumed by cells, media exchange is required. To connect cell culture chamber to the media exchange layer, we demonstrated a 3D microsystem integration technique using vertical connections fabricated by deep reactive-ion etching (DRIE). Compared to previous approaches, the presented process allows the area reduction in vertical connections by an order of magnitude, enabling compact 3D integration. A semi-permeable membrane was sandwiched between cell culture layer and media exchange layer. The selectivity of the semi-permeable membrane can retain the signaling proteins within the chamber, while allowing free diffusion of nutrients (e.g., glucose and amino acids). Thus, paracrine signals are accumulated inside the chamber without cross-talk with cells in other chambers. Utilizing these innovations, we demonstrated co-culture of UM-SCC-1 (head and neck squamous cell carcinoma) cells and endothelial cells to recapitulate tumor proliferation enhancement in the vascular endothelial niche.

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Section: Resultsmentioning

confidence: 99%

Paired single cell co-culture microenvironments isolated by two-phase flow with continuous nutrient renewal

et al. 2014

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“…In the case of anisotropic dry etching, the sidewall slopes are usually larger than 80° [10]. For example, for a binary grating with a period of 10 μm and etching depth of 500 nm, the sidewall slope ratio P is less than 1%.…”

Section: A Parametric Modelmentioning

confidence: 99%

Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

et al. 2014

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We present a new device, the diffractive optics calibrator (DOC), for measuring etching variations of computer-generated holograms (CGHs). The intensity distribution of the far-field diffraction pattern is captured and fitted to a parametric model to obtain local etching parameters such as the duty cycle, etching depth, and grating period. The sensitivity of each etching parameter is analyzed, and design choices are provided. For the wavefront created by the CGH, the DOC is capable of measuring variations in these parameters that cause 1 nm peak-to-valley phase errors. System performance is verified by measurements from a phase shift Fizeau interferometer. This device will be used primarily for quality control of the CGHs. The measurement results can be used to evaluate the fabrication performance and guide future design. DOC is also capable of generating an induced phase error map for calibration. Such calibration is essential for measuring free-form aspheric surfaces with 1 nm root-mean-square accuracy.

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“…The silica wafer is subsequently flipped and attached to a carrier for wafer thinning. Backside DRIE is used to define the resonator geometry [7]. Devices are detached from the carrier during the final release.…”

Section: Resonator Fabricationmentioning

confidence: 99%

“…Recently, capacitively transduced silica-on-silicon micro-resonators have been demonstrated, showing relatively high Qs but also a high level of insertion loss [6]. In this work, we choose piezoelectric actuation as it does not require small gaps for efficient transduction and devise a fabrication process to implement isolated silica resonators ideal for use in an all-silica platform [7]. The silica resonators in this work exhibit high Qs, low motional impedance, and good power handling capability.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectrically transduced high-Q silica micro resonators

Peczalski

Thakar

et al. 2013

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)

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In this paper, we report on high-performance piezoelectric-on-silica micromechanical resonators for integrated timing applications. Fused silica is used as the resonator structural material for its excellent material properties, and thin film aluminum nitride is used as the piezoelectric transduction layer. A silica resonator is demonstrated with a high quality factor (Q U ~25,841), low motional impedance (R m ~350 ȍ), and good power handling capability. The measured fuQ product of this resonator is the highest amongst reported micromachined silica/fused quartz resonators.

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Drie of fused silica

Cited by 18 publications

References 6 publications

Paired single cell co-culture microenvironments isolated by two-phase flow with continuous nutrient renewal

Paired single cell co-culture microenvironments isolated by two-phase flow with continuous nutrient renewal

Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

Piezoelectrically transduced high-Q silica micro resonators

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