Driving frequency dependence of capacitively coupled plasmas in atmospheric argon

Atanasova, Mariana; Sobota, Ana; Brok, Wjm Wouter; Degrez, Gérard; Mullen, van der Jjam Joost

doi:10.1088/0022-3727/45/33/335201

Cited by 3 publications

(2 citation statements)

References 32 publications

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“…For a similar geometry with 2 mm inter-electrode gap, a driving frequency of 13.56 MHz and similar power density in Ar, the modeling results reported an n e of 8 × 10 17 m −3 in the bulk and a T e of ∼2.5 eV. 63 This model accounted for the deviations from Maxwellian distribution by calculating the EEDF from Bolsig+ and also included stepwise ionization as one of the prominent electron production mechanisms in the plasma. Using similar model, but with a different geometry, an n e of 7 × 10 17 m −3 was reported, while the T e varied from 2.1 eV to 2.9 eV within one RF discharge cycle.…”

Section: P Vmentioning

confidence: 92%

“…38 In this case, a non-Maxwellian EEDF increases the likelihood of other dominant reaction mechanisms for the 1s 5 production. In an atmospheric pressure Ar glow discharge, Ar + ions produced by ionization are rapidly converted by 3-body reaction involving two Ar atoms, into Ar + 2 dimer ions, 63 which rapidly recombine with electrons to produce Ar atoms in excited states; all these excited atoms ending finally in 1s states.…”

Section: Ar Rf Glow Dischargementioning

confidence: 99%

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Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Nayak

Simeni

Rosato

et al. 2020

Journal of Applied Physics

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Atmospheric pressure plasmas in argon are of particular interest due to the production of highly excited and reactive species enabling numerous plasma-aided applications. In this contribution, we report on absolute optical emission and absorption spectroscopy of a radio frequency (RF) driven capacitively coupled argon glow discharge operated in a parallel-plate configuration. This enabled the study of all key parameters including electron density and temperature, gas temperature, and absolute densities of atoms in highly electronically excited states. The space and time-averaged electron density and temperature were determined from the measurement of the absolute intensity of the electron-atom bremsstrahlung in the visible range. Considering the non-Maxwellian electron energy distribution function, an electron temperature (T e ) of 2.1 eV and an electron density (n e ) of 1.1 × 10 19 m −3 were obtained. The time-averaged and spatially resolved absolute densities of atoms in the metastable (1s 5 and 1s 3 ) and resonant (1s 4 and 1s 2 ) states of argon in pure Ar and Ar/He mixture were obtained by broadband absorption spectroscopy. The 1s 5 metastable atoms had the largest density near the sheath region with a maximum value of 8 × 10 17 m −3 , while all other 1s states had densities of at most 2 × 10 17 m −3 . The dominant production and loss mechanisms of these atoms were discussed, in particular, the role of radiation trapping. We conclude with a comparison of the plasma properties of the argon RF glow discharges with the more common He equivalent and highlight their differences.

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Section: P Vmentioning

confidence: 92%

Section: Ar Rf Glow Dischargementioning

confidence: 99%

Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Nayak

Simeni

Rosato

et al. 2020

Journal of Applied Physics

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Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

Park

Choe

Moon

et al. 2018

Sci Rep

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Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear. Here, we report the electrical characteristics and electron information in single-frequency (4.52 MHz and 13.56 MHz) and dual-frequency (a combination of 4.52 MHz and 13.56 MHz) capacitive discharges within the abnormal α-mode regime at atmospheric pressure. A continuum radiation-based electron diagnostic method is employed to estimate the electron density (ne) and temperature (Te). Our experimental observations reveal that time-averaged ne (7.7–14 × 1011 cm−3) and Te (1.75–2.5 eV) can be independently controlled in dual-frequency discharge, whereas such control is nontrivial in single-frequency discharge, which shows a linear increase in ne and little to no change in Te with increases in the rf input power. Furthermore, the two-dimensional spatiotemporal evolution of neutral bremsstrahlung and associated electron heating structures is demonstrated. These results reveal that a symmetric structure in electron heating becomes asymmetric (via a local suppression of electron temperature) as two-frequency power is simultaneously introduced.

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The discharged characteristics of capacitively coupled Ar/N₂ plasma driven by the dual frequency 8/100 MHz

Qianghua¹

2023

Eur. Phys. J. Appl. Phys.

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The discharged characteristics of capacitively coupled Ar/N2 plasma driven by 8 MHz and 100 MHz are investigated at low pressure. The mean electron temperatures at central plasma area are discussed by the corona model with the high frequency (HF) power increase (low frequency (LF) power is fixed) and argon increase. The second positive system (SPS) of nitrogen molecular (C3Πu→B3Πg) from 370 nm to 410 nm in the N2 optical emission spectrum is used to calculate the rotational and vibrational temperature of nitrogen molecular. These results show that the mean electron temperatures both decrease with the argon increase and the HF power increase. The rotational temperature increase with argon increase and decrease with the HF power increase. The particle-in-cell/Monte Carlo (PIC/MC) method is used to calculate the ion density, electron temperature and electron energy probability function (EEPF) according to experimental conditions. These results show that the electron temperatures both decrease with HF power increase and argon content increase, which are agreed with the spectral results. The EEPF show that the low and high energy electrons both increase with the HF power increase and argon increase. The energy exchange by these higher energy electrons is large, which result in the decrease of electron temperatures.

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Driving frequency dependence of capacitively coupled plasmas in atmospheric argon

Cited by 3 publications

References 32 publications

Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

The discharged characteristics of capacitively coupled Ar/N₂ plasma driven by the dual frequency 8/100 MHz

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Driving frequency dependence of capacitively coupled plasmas in atmospheric argon

Cited by 3 publications

References 32 publications

Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Characterization of an RF-driven argon plasma at atmospheric pressure using broadband absorption and optical emission spectroscopy

Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

The discharged characteristics of capacitively coupled Ar/N2 plasma driven by the dual frequency 8/100 MHz

Contact Info

Product

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The discharged characteristics of capacitively coupled Ar/N₂ plasma driven by the dual frequency 8/100 MHz