“…In a series of papers following the original work of Shikida et al [20], several authors have proposed micromechanical systems based on the deformation of an S-shaped metallic ribbon actuated by electrostatic forces. These works served to make valves, RF or optical switches [21][22][23]. We propose in this paper a novel concept of lowpower high-volume microfluidic actuator based on a flexible S-shaped metallized polymer film, which adresses the isssues raised by previoulsy proposed pump architectrures for large fluid volume displacements applications [24].…”