Dry etching properties of TiO2 thin films in O2/CF4/Ar plasma

Choi, Kyung-Rok; Woo, Jong‐Chang; Joo, Young-Hee; Chun, Yeoun Sook; Kim, Chang-Il

doi:10.1016/j.vacuum.2012.11.009

Cited by 30 publications

(12 citation statements)

References 19 publications

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“…This high refractive index will pull field distribution move to PhCs and thus obtain a high PhC confinement factor. Besides, TiO 2 is a widely available material with compatible growth properties and can be easily fabricated as micro-nano structures, such as gratings and photonic crystals [31][32][33][34][35]. Different lattice constants and hole radius designs have the function of realizing different wavelength mode lasing, as illustrated in Figure 3.…”

Section: Resultsmentioning

confidence: 99%

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

et al. 2022

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A GaN-based blue photonic crystal surface emitting laser (PCSEL) featured with membrane configuration was proposed and theoretically investigated. The membrane dimension, photonic crystal (PhC) material, lattice constant and thickness were studied by RCWA (Rigorous Coupled Wave Analysis), FDTD (Finite Difference Time Domain) simulations with the confinement factor and gain threshold as indicators. The membrane PCSEL’s confinement factor of active media is of 13~14% which is attributed to multi-pairs of quantum wells and efficient confinement of the mode in the membrane cavity with air claddings. The excellent confinement factor and larger Q factor of resonance mutually contribute to the lower gain threshold of the design (below 400 cm−1 for GaN-PhC with 100 nm thick top and bottom GaN layer, 40 nm hole radius and 40 nm depth). The PhC confinement factor exceeds 13% and 6% for TiO2-PhC with 80 nm and 60 nm PhC thickness and 20 nm and 40 nm distance between PhC and active media, respectively. It is around two times larger than that of GaN-PhC, which is attributed to the higher refractive index of TiO2 that pulls field distribution to the PhC layer.

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Section: Resultsmentioning

confidence: 99%

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

et al. 2022

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“…Unlike Al 2 O 3 , TiO 2 is etched by fluorine chemistry. Based on the work of Choi et al, 38 a CF 4 -O 2 -based process has been developed resulting in a TiO 2 etch rate of ≈ 1.5 nm/s and a TiO 2 over Al 2 O 3 selectivity of ≈ 29. Hence, the top hard mask layer was sufficiently thick.…”

Section: Sample Fabrication Schemementioning

confidence: 99%

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Piechulla,

Fuhrmann,

Slivina

et al. 2021

Preprint

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Arrays of nanoparticles exploited in light scattering applications commonly only feature either a periodic or a rather random arrangement of its constituents. For the periodic case, light scattering is mostly governed by the strong spatial correlations of the arrangement, expressed by the structure factor. For the random case, structural correlations cancel each other out and light scattering is mostly governed by the scattering properties of the individual scatterer, expressed by the form factor. In contrast to these extreme cases, we show here, 1

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“…The etching of TiO 2 structures via plasma has been widely discussed in literature. 33,34 We tested two different gases: CF 4 and SF 6 . Preliminary experiments were performed using a photoresist mask patterned on the micron-scale to identify the parameters suitable for the etching of our TiO 2 membranes deposited by e-beam evaporation at room temperature.…”

Section: Dependence Of the Tio 2 Phase And Refractive Index On The Famentioning

confidence: 99%

Rolled-up TiO₂microtubes for photonics applications

et al. 2014

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The properties of titania (TiO 2 ) are explored within the context of rolled-up nanotechnology, with particular attention to possible photonics applications. We show how the morphology of titania microtubes, as well as the TiO 2 phase and refractive index, can be controlled by properly tuning the microfabrication parameters. High refractive index TiO 2 tubes are proven to work as microresonators. The possibility of combining the rolling technique with an adequate prepatterning of the titania membrane could pave the way for the fabrication of a rolled-up diamond-like photonic crystal operating at visible frequencies, as substantiated by theory.

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Dry etching properties of TiO2 thin films in O2/CF4/Ar plasma

Cited by 30 publications

References 19 publications

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Rolled-up TiO₂microtubes for photonics applications

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Dry etching properties of TiO2 thin films in O2/CF4/Ar plasma

Cited by 30 publications

References 19 publications

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

Investigation on GaN-Based Membrane Photonic Crystal Surface Emitting Lasers

Tailored Light Scattering through Hyperuniform Disorder in self-organized arrays of high-index Nanodisks

Rolled-up TiO2microtubes for photonics applications

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Rolled-up TiO₂microtubes for photonics applications